Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11035804 | System and method for x-ray imaging and classification of volume defects | Richard W. Solarz, Oleg Khodykin, Bosheng Zhang | 2021-06-15 |
| 10126251 | Inspection systems and techniques with enhanced detection | — | 2018-11-13 |
| 10082470 | Defect marking for semiconductor wafer inspection | David W. Shortt, Junwei Wei, Daniel L. Kapp, Charles Amsden | 2018-09-25 |
| 9696264 | Apparatus and methods for determining defect depths in vertical stack memory | Robert M. Danen, Stefano Palomba | 2017-07-04 |
| 9612209 | Apparatus and methods for detecting defects in vertical memory | — | 2017-04-04 |
| 9599573 | Inspection systems and techniques with enhanced detection | — | 2017-03-21 |
| 9558858 | System and method for imaging a sample with a laser sustained plasma illumination output | David W. Shortt, Matthew Derstine, Kenneth P. Gross, Wei Zhao, Ilya Bezel +1 more | 2017-01-31 |
| 9075027 | Apparatus and methods for detecting defects in vertical memory | — | 2015-07-07 |
| 8912495 | Multi-spectral defect inspection for 3D wafers | — | 2014-12-16 |
| 8705027 | Optical defect amplification for improved sensitivity on patterned layers | Stephane Durant, Gregory L. Kirk, Robert M. Danen, Prashant Aji | 2014-04-22 |
| 7465141 | Multilevel vertical general aviation hangar | Oscar A. Fournier, John N. Bowman, Thomas Brew, Glenn C. Friedly, Eric P. Olsen +2 more | 2008-12-16 |
| 7351980 | All-reflective optical systems for broadband wafer inspection | — | 2008-04-01 |
| 7352456 | Method and apparatus for inspecting a substrate using a plurality of inspection wavelength regimes | — | 2008-04-01 |
| 7130037 | Systems for inspecting wafers and reticles with increased resolution | — | 2006-10-31 |
| 7031796 | Radiation damage reduction | — | 2006-04-18 |
| 7001055 | Uniform pupil illumination for optical inspection systems | — | 2006-02-21 |
| 6862142 | Multi-detector microscopic inspection system | — | 2005-03-01 |
| 6791680 | System and method for inspecting semiconductor wafers | Eliezer Rosengaus | 2004-09-14 |
| 6788404 | Inspection system with multiple illumination sources | — | 2004-09-07 |
| 6603541 | Wafer inspection using optimized geometry | — | 2003-08-05 |
| 6570650 | Apparatus and methods for reducing thin film color variation in optical inspection of semiconductor devices and other surfaces | Yu Guan, Hong Fu | 2003-05-27 |
| 6062624 | Sealing acoustical baffle and method therefor | Joseph Crabtree | 2000-05-16 |
| 6020957 | System and method for inspecting semiconductor wafers | Eliezer Rosengaus | 2000-02-01 |
| 5116115 | Method and apparatus for measuring corneal topography | Edmond H. Thall | 1992-05-26 |
| 5055695 | Alignment system and method for infrared interferometer | — | 1991-10-08 |