RD

Robert M. Danen

KL Kla-Tencor: 23 patents #38 of 1,394Top 3%
KL Kla: 2 patents #202 of 758Top 30%
Overall (All Time): #160,406 of 4,157,543Top 4%
25
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
11921052 Inspection with previous step subtraction Sangbong Park, Dmitri Starodub, Abdurrahman Sezginer 2024-03-05
11047806 Defect discovery and recipe optimization for inspection of three-dimensional semiconductor structures Santosh Bhattacharyya, Devashish Sharma, Christopher Maher, Bo Hua, Philip Measor 2021-06-29
10957568 Phase filter for enhanced defect detection in multilayer structure Dmitri Starodub 2021-03-23
10928740 Three-dimensional calibration structures and methods for measuring buried defects on a three-dimensional semiconductor wafer Philip Measor 2021-02-23
10887580 Three-dimensional imaging for semiconductor wafer inspection Pavel Kolchin, Philip Measor 2021-01-05
10621718 Aided image reconstruction Soren Konecky 2020-04-14
10615067 Phase filter for enhanced defect detection in multilayer structure Dmitri Starodub 2020-04-07
10571407 Determining information for defects on wafers Stefano Palomba, Pavel Kolchin, Mikhail Haurylau, David W. Shortt 2020-02-25
10338002 Methods and systems for selecting recipe for defect inspection Shuo Sun, Thomas B. Boatwright 2019-07-02
10317347 Determining information for defects on wafers Stefano Palomba, Pavel Kolchin, Mikhail Haurylau, David W. Shortt 2019-06-11
10249546 Reverse decoration for defect detection amplification Philip Measor, Paul MacDonald 2019-04-02
10215713 Determining a configuration for an optical element positioned in a collection aperture during wafer inspection Pavel Kolchin, Mikhail Haurylau, Junwei Wei, Dan Kapp, Grace Hsiu-Ling Chen 2019-02-26
10132760 Apparatus and methods for finding a best aperture and mode to enhance defect detection Pavel Kolchin, Richard Wallingford, Lisheng Gao, Grace Hsiu-Ling Chen, Markus Huber 2018-11-20
9989479 System and method to determine depth for optical wafer inspection Pavel Kolchin, Mikhail Haurylau 2018-06-05
9726617 Apparatus and methods for finding a best aperture and mode to enhance defect detection Pavel Kolchin, Richard Wallingford, Lisheng Gao, Grace Hsiu-Ling Chen, Markus Huber 2017-08-08
9709510 Determining a configuration for an optical element positioned in a collection aperture during wafer inspection Pavel Kolchin, Mikhail Haurylau, Junwei Wei, Dan Kapp, Grace Hsiu-Ling Chen 2017-07-18
9696264 Apparatus and methods for determining defect depths in vertical stack memory Steven R. Lange, Stefano Palomba 2017-07-04
9645093 System and method for apodization in a semiconductor device inspection system Jamie M. Sullivan, Gary Janik, Steve Cui, Rex Runyon, Dieter Wilk +8 more 2017-05-09
9523646 Wafer and reticle inspection systems and methods for selecting illumination pupil configurations Grace Hsiu-Ling Chen, Rudolf Brunner, Lisheng Gao, Lu Chen 2016-12-20
9389349 System and method to determine depth for optical wafer inspection Pavel Kolchin, Mikhail Haurylau 2016-07-12
9347891 Wafer and reticle inspection systems and methods for selecting illumination pupil configurations Grace Hsiu-Ling Chen, Rudolf Brunner, Lisheng Gao, Lu Chen 2016-05-24
9176069 System and method for apodization in a semiconductor device inspection system Jamie M. Sullivan, Gary Janik, Steve Cui, Rex Runyon, Dieter Wilk +8 more 2015-11-03
8705027 Optical defect amplification for improved sensitivity on patterned layers Steven R. Lange, Stephane Durant, Gregory L. Kirk, Prashant Aji 2014-04-22
7940384 Systems and methods for blocking specular reflection and suppressing modulation from periodic features on a specimen Andrew V. Hill 2011-05-10
7710564 Polarized broadband wafer inspection Peter C. Hill, Charles N. Wang 2010-05-04