Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11921052 | Inspection with previous step subtraction | Sangbong Park, Dmitri Starodub, Abdurrahman Sezginer | 2024-03-05 |
| 11047806 | Defect discovery and recipe optimization for inspection of three-dimensional semiconductor structures | Santosh Bhattacharyya, Devashish Sharma, Christopher Maher, Bo Hua, Philip Measor | 2021-06-29 |
| 10957568 | Phase filter for enhanced defect detection in multilayer structure | Dmitri Starodub | 2021-03-23 |
| 10928740 | Three-dimensional calibration structures and methods for measuring buried defects on a three-dimensional semiconductor wafer | Philip Measor | 2021-02-23 |
| 10887580 | Three-dimensional imaging for semiconductor wafer inspection | Pavel Kolchin, Philip Measor | 2021-01-05 |
| 10621718 | Aided image reconstruction | Soren Konecky | 2020-04-14 |
| 10615067 | Phase filter for enhanced defect detection in multilayer structure | Dmitri Starodub | 2020-04-07 |
| 10571407 | Determining information for defects on wafers | Stefano Palomba, Pavel Kolchin, Mikhail Haurylau, David W. Shortt | 2020-02-25 |
| 10338002 | Methods and systems for selecting recipe for defect inspection | Shuo Sun, Thomas B. Boatwright | 2019-07-02 |
| 10317347 | Determining information for defects on wafers | Stefano Palomba, Pavel Kolchin, Mikhail Haurylau, David W. Shortt | 2019-06-11 |
| 10249546 | Reverse decoration for defect detection amplification | Philip Measor, Paul MacDonald | 2019-04-02 |
| 10215713 | Determining a configuration for an optical element positioned in a collection aperture during wafer inspection | Pavel Kolchin, Mikhail Haurylau, Junwei Wei, Dan Kapp, Grace Hsiu-Ling Chen | 2019-02-26 |
| 10132760 | Apparatus and methods for finding a best aperture and mode to enhance defect detection | Pavel Kolchin, Richard Wallingford, Lisheng Gao, Grace Hsiu-Ling Chen, Markus Huber | 2018-11-20 |
| 9989479 | System and method to determine depth for optical wafer inspection | Pavel Kolchin, Mikhail Haurylau | 2018-06-05 |
| 9726617 | Apparatus and methods for finding a best aperture and mode to enhance defect detection | Pavel Kolchin, Richard Wallingford, Lisheng Gao, Grace Hsiu-Ling Chen, Markus Huber | 2017-08-08 |
| 9709510 | Determining a configuration for an optical element positioned in a collection aperture during wafer inspection | Pavel Kolchin, Mikhail Haurylau, Junwei Wei, Dan Kapp, Grace Hsiu-Ling Chen | 2017-07-18 |
| 9696264 | Apparatus and methods for determining defect depths in vertical stack memory | Steven R. Lange, Stefano Palomba | 2017-07-04 |
| 9645093 | System and method for apodization in a semiconductor device inspection system | Jamie M. Sullivan, Gary Janik, Steve Cui, Rex Runyon, Dieter Wilk +8 more | 2017-05-09 |
| 9523646 | Wafer and reticle inspection systems and methods for selecting illumination pupil configurations | Grace Hsiu-Ling Chen, Rudolf Brunner, Lisheng Gao, Lu Chen | 2016-12-20 |
| 9389349 | System and method to determine depth for optical wafer inspection | Pavel Kolchin, Mikhail Haurylau | 2016-07-12 |
| 9347891 | Wafer and reticle inspection systems and methods for selecting illumination pupil configurations | Grace Hsiu-Ling Chen, Rudolf Brunner, Lisheng Gao, Lu Chen | 2016-05-24 |
| 9176069 | System and method for apodization in a semiconductor device inspection system | Jamie M. Sullivan, Gary Janik, Steve Cui, Rex Runyon, Dieter Wilk +8 more | 2015-11-03 |
| 8705027 | Optical defect amplification for improved sensitivity on patterned layers | Steven R. Lange, Stephane Durant, Gregory L. Kirk, Prashant Aji | 2014-04-22 |
| 7940384 | Systems and methods for blocking specular reflection and suppressing modulation from periodic features on a specimen | Andrew V. Hill | 2011-05-10 |
| 7710564 | Polarized broadband wafer inspection | Peter C. Hill, Charles N. Wang | 2010-05-04 |