Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10249546 | Reverse decoration for defect detection amplification | Philip Measor, Robert M. Danen | 2019-04-02 |
| 9029728 | Methods of and apparatuses for measuring electrical parameters of a plasma process | Randall S. Mundt, Andrew Beers, Mason L. Freed, Costas J. Spanos | 2015-05-12 |
| 8716662 | Methods and apparatus to review defects using scanning electron microscope with multiple electron beam configurations | Hong Xiao | 2014-05-06 |
| 8698037 | Methods of and apparatuses for maintenance, diagnosis, and optimization of processes | Randall S. Mundt, Andrew Beers, Mason L. Freed, Costas J. Spanos | 2014-04-15 |
| 7960670 | Methods of and apparatuses for measuring electrical parameters of a plasma process | Randall S. Mundt, Andrew Beers, Mason L. Freed, Costas J. Spanos | 2011-06-14 |
| 7580767 | Methods of and apparatuses for maintenance, diagnosis, and optimization of processes | Michiel V. P. Krüger, Michael Welch, Mason L. Freed, Costas J. Spanos | 2009-08-25 |
| 7482576 | Apparatuses for and methods of monitoring optical radiation parameters for substrate processing operations | Randall S. Mundt, Andrew Beers, Mason L. Freed, Dean Hunt | 2009-01-27 |