Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9029728 | Methods of and apparatuses for measuring electrical parameters of a plasma process | Paul MacDonald, Andrew Beers, Mason L. Freed, Costas J. Spanos | 2015-05-12 |
| 8698037 | Methods of and apparatuses for maintenance, diagnosis, and optimization of processes | Paul MacDonald, Andrew Beers, Mason L. Freed, Costas J. Spanos | 2014-04-15 |
| 7960670 | Methods of and apparatuses for measuring electrical parameters of a plasma process | Paul MacDonald, Andrew Beers, Mason L. Freed, Costas J. Spanos | 2011-06-14 |
| 7722434 | Apparatus for measurement of parameters in process equipment | — | 2010-05-25 |
| 7531984 | Sensor apparatus power transfer, communication and maintenance methods and apparatus | Mason L. Freed, Costas J. Spanos | 2009-05-12 |
| 7482576 | Apparatuses for and methods of monitoring optical radiation parameters for substrate processing operations | Andrew Beers, Paul MacDonald, Mason L. Freed, Dean Hunt | 2009-01-27 |
| 7282889 | Maintenance unit for a sensor apparatus | Mason L. Freed, Costas J. Spanos | 2007-10-16 |
| 7127362 | Process tolerant methods and apparatus for obtaining data | — | 2006-10-24 |
| RE39145 | Method and apparatus for in-situ monitoring of plasma etch and deposition processes using a pulsed broadband light source | Andrew Perry | 2006-06-27 |
| 6907364 | Methods and apparatus for deriving thermal flux data for processing a workpiece | Kameshwar Poolla | 2005-06-14 |
| 6878301 | Methods and apparatuses for trench depth detection and control | — | 2005-04-12 |
| 6719456 | Methods and apparatus for firefighting | James C. Mundt | 2004-04-13 |
| 6691068 | Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control | Mason L. Freed, Costas J. Spanos | 2004-02-10 |
| 6642063 | Apparatus for characterization of microelectronic feature quality | Albert Lamm, Mike Whelan, Andrew Weeks Kueny | 2003-11-04 |
| 6582619 | Methods and apparatuses for trench depth detection and control | — | 2003-06-24 |
| 6542835 | Data collection methods and apparatus | — | 2003-04-01 |
| 6432729 | Method for characterization of microelectronic feature quality | Albert Lamm, Mike Whelan, Andrew Weeks Kueny | 2002-08-13 |
| 6160621 | Method and apparatus for in-situ monitoring of plasma etch and deposition processes using a pulsed broadband light source | Andrew Perry | 2000-12-12 |
| 5846373 | Method for monitoring process endpoints in a plasma chamber and a process monitoring arrangement in a plasma chamber | David R. Pirkle, William Harshbarger | 1998-12-08 |
| 5791850 | Vacuum compatible fastener and fastening system | Valentine Balter | 1998-08-11 |
| 5718511 | Temperature mapping method | — | 1998-02-17 |
| 5714031 | Topology induced plasma enhancement for etched uniformity improvement | David Kerr, Eric H. Lenz | 1998-02-03 |
| 5702533 | Particulate free vacuum compatible pinch seal | Kenneth R. Krieg | 1997-12-30 |
| 5654796 | Apparatus and method for mapping plasma characteristics | — | 1997-08-05 |
| 5644400 | Method and apparatus for determining the center and orientation of a wafer-like object | — | 1997-07-01 |