Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5472565 | Topology induced plasma enhancement for etched uniformity improvement | David Kerr, Eric H. Lenz | 1995-12-05 |
| 5463526 | Hybrid electrostatic chuck | — | 1995-10-31 |
| 5368646 | Reaction chamber design to minimize particle generation in chemical vapor deposition reactors | Arthur K. Yasuda, Dean R. Denison, James E. Tappan | 1994-11-29 |
| 5262029 | Method and system for clamping semiconductor wafers | David J. Erskine, Dariush Rafinejad, Vernon Wong, Gerald Zhe Yao YIN | 1993-11-16 |
| 5200232 | Reaction chamber design and method to minimize particle generation in chemical vapor deposition reactors | James E. Tappan, Arthur K. Yasuda, Dean R. Denison | 1993-04-06 |
| 5137701 | Apparatus and method for eliminating unwanted materials from a gas flow line | — | 1992-08-11 |
| 4671970 | Trench filling and planarization process | Alan E. Keiser | 1987-06-09 |
| 4656497 | Trench isolation structures | Steven H. Rogers, Denise A. Kaya | 1987-04-07 |
| 4578128 | Process for forming retrograde dopant distributions utilizing simultaneous outdiffusion of dopants | Ray E. Wyatt | 1986-03-25 |
| 4571819 | Method for forming trench isolation structures | Steven H. Rogers, Denise A. Kaya | 1986-02-25 |
| 4297162 | Plasma etching using improved electrode | Timothy A. Wooldridge, Thomas O. Blasingame | 1981-10-27 |