Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679215 | Method of in situ cleaning a vacuum plasma processing chamber | Michael Barnes | 1997-10-21 |
| 5368646 | Reaction chamber design to minimize particle generation in chemical vapor deposition reactors | Dean R. Denison, Randall S. Mundt, James E. Tappan | 1994-11-29 |
| 5200232 | Reaction chamber design and method to minimize particle generation in chemical vapor deposition reactors | James E. Tappan, Dean R. Denison, Randall S. Mundt | 1993-04-06 |
| 4715469 | Borehole seismic receiver | William S. Kennedy, Peter Aronstam | 1987-12-29 |