Issued Patents All Time
Showing 25 most recent of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9614677 | Secure function evaluation of tree circuits | Gordon Wilfong, Vladimir Kolesnikov | 2017-04-04 |
| 9234775 | Methods for verifying gas flow rates from a gas supply system into a plasma processing chamber | Dean J. Larson, Robert C. Hefty, James V. Tietz, Eric H. Lenz, William M. Denty, Jr. +1 more | 2016-01-12 |
| 9053925 | Configurable bevel etcher | Andrew D. Bailey, III, Alan M. Schoepp, Gregory Sexton, Yunsang Kim | 2015-06-09 |
| 8721908 | Bevel etcher with vacuum chuck | Andrew D. Bailey, III, Alan M. Schoepp, Gregory Sexton | 2014-05-13 |
| 8580078 | Bevel etcher with vacuum chuck | Andrew D. Bailey, III, Alan M. Schoepp, Gregory Sexton | 2013-11-12 |
| 8573153 | Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode | Andreas Fischer, Peter Loewenhardt, David Trussell | 2013-11-05 |
| 8080107 | Showerhead electrode assembly for plasma processing apparatuses | David Jacob | 2011-12-20 |
| 7943007 | Configurable bevel etcher | Andrew D. Bailey, III, Alan M. Schoepp, Gregory Sexton, Yunsang Kim | 2011-05-17 |
| 7861667 | Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode | Andreas Fischer, Peter Loewenhardt, David Trussell | 2011-01-04 |
| 7858898 | Bevel etcher with gap control | Andrew D. Bailey, III, Alan M. Schoepp, Gregory Sexton, Andras Kuthi, Yunsang Kim | 2010-12-28 |
| 7827657 | Method of making an electrode assembly for plasma processing apparatus | David Jacob | 2010-11-09 |
| 7645341 | Showerhead electrode assembly for plasma processing apparatuses | David Jacob | 2010-01-12 |
| 7543547 | Electrode assembly for plasma processing apparatus | David Jacob | 2009-06-09 |
| 6583064 | Low contamination high density plasma etch chambers and methods for making the same | Thomas E. Wicker, Robert A. Maraschin | 2003-06-24 |
| 6408786 | Semiconductor processing equipment having tiled ceramic liner | Robert A. Maraschin, Jerome S. Hubacek | 2002-06-25 |
| 6394026 | Low contamination high density plasma etch chambers and methods for making the same | Thomas E. Wicker, Robert A. Maraschin | 2002-05-28 |
| 6376385 | Method of manufacturing assembly for plasma reaction chamber and use thereof | John Lilleland, Jerome S. Hubacek | 2002-04-23 |
| 6306244 | Apparatus for reducing polymer deposition on substrate support | Thomas E. Wicker, Robert A. Maraschin, Joel M. Cook, Alan M. Schoepp | 2001-10-23 |
| 6227140 | Semiconductor processing equipment having radiant heated ceramic liner | Robert A. Maraschin, Thomas E. Wicker | 2001-05-08 |
| 6194322 | Electrode for plasma processes and method for a manufacture and use thereof | John Lilleland, Jerome S. Hubacek | 2001-02-27 |
| 6155203 | Apparatus for control of deposit build-up on an inner surface of a plasma processing chamber | Albert Lamm, Thomas E. Wicker, Robert A. Maraschin | 2000-12-05 |
| 6148765 | Electrode for plasma processes and method for manufacture and use thereof | John Lilleland, Jerome S. Hubacek | 2000-11-21 |
| 6129808 | Low contamination high density plasma etch chambers and methods for making the same | Thomas E. Wicker, Robert A. Maraschin | 2000-10-10 |
| 6073577 | Electrode for plasma processes and method for manufacture and use thereof | John Lilleland, Jerome S. Hubacek | 2000-06-13 |
| 6063234 | Temperature sensing system for use in a radio frequency environment | Jian J. Chen | 2000-05-16 |