| 8801892 |
Uniform etch system |
Dean J. Larson, Babak Kadkhodayan, Di Wu, Kenji Takeshita, Bi-Ming Yen +2 more |
2014-08-12 |
$19,292,000 |
| 8573153 |
Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode |
Andreas Fischer, William S. Kennedy, David Trussell |
2013-11-05 |
$8,091,000 |
| 8430970 |
Methods for preventing corrosion of plasma-exposed yttria-coated constituents |
Ganapathy Swami, Yunsang Kim |
2013-04-30 |
$18,578,000 |
| 8337713 |
Methods for RF pulsing of a narrow gap capacitively coupled reactor |
Mukund Srinivasan, Andreas Fischer |
2012-12-25 |
|
| 7976673 |
RF pulsing of a narrow gap capacitively coupled reactor |
Mukund Srinivasan, Andreas Fischer |
2011-07-12 |
$5,390,000 |
| 7861667 |
Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode |
Andreas Fischer, William S. Kennedy, David Trussell |
2011-01-04 |
$5,920,000 |
| 7601246 |
Methods of sputtering a protective coating on a semiconductor substrate |
Jisoo Kim, Jong Shon, Biming Yen |
2009-10-13 |
$50,587,000 |
| 7597816 |
Wafer bevel polymer removal |
Jeremy Chang, Andreas Fischer |
2009-10-06 |
$9,438,000 |
| 7385287 |
Preventing damage to low-k materials during resist stripping |
Siyi Li, Helen Zhu, Howard Dang, Thomas S. Choi |
2008-06-10 |
$8,671,000 |
| 7371332 |
Uniform etch system |
Dean J. Larson, Babak Kadkhodayan, Di Wu, Kenji Takeshita, Bi-Ming Yen +2 more |
2008-05-13 |
$38,829,000 |
| 7363876 |
Multi-core transformer plasma source |
Canfeng Lai, Michael S. Cox, Tsutomu Tanaka, Shamouil Shamouilian |
2008-04-29 |
$20,360,000 |
| 7294580 |
Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition |
Seokmin Yun, Ji Zhu, Peter Cirigliano, Sangheon Lee, Thomas S. Choi +4 more |
2007-11-13 |
$14,165,000 |
| 7244336 |
Temperature controlled hot edge ring assembly for reducing plasma reactor etch rate drift |
Andreas Fischer |
2007-07-17 |
$31,625,000 |
| 7226852 |
Preventing damage to low-k materials during resist stripping |
Siyi Li, Helen Zhu, Howard Dang, Thomas S. Choi |
2007-06-05 |
$15,368,000 |
| 7211518 |
Waferless automatic cleaning after barrier removal |
Xiaoqiang Yao, Bi-Ming Yen, Taejoon Han |
2007-05-01 |
$33,380,000 |
| 7169231 |
Gas distribution system with tuning gas |
Dean J. Larson, Babak Kadkhodayan, Di Wu, Kenji Takeshita, Bi-Ming Yen +2 more |
2007-01-30 |
$14,926,000 |
| 7078350 |
Methods for the optimization of substrate etching in a plasma processing system |
Jisoo Kim, Binet Worsham, Bi-Ming Yen |
2006-07-18 |
$11,880,000 |
| 7041230 |
Method for selectively etching organosilicate glass with respect to a doped silicon carbide |
Xingcai Su, Bi-Ming Yen |
2006-05-09 |
$7,161,000 |
| 6979579 |
Methods and apparatus for inspecting contact openings in a plasma processing system |
Jisoo Kim, Sangheon Lee, Sean S. Kang, Binet Worsham, Bi-Ming Yen +1 more |
2005-12-27 |
$18,832,000 |
| 6949469 |
Methods and apparatus for the optimization of photo resist etching in a plasma processing system |
Yu-Huei Cheng, Helen Zhu, Vinay V. Phoray, Hanzhong Xiao |
2005-09-27 |
$4,743,000 |
| 6949460 |
Line edge roughness reduction for trench etch |
Eric Wagganer, Helen Zhu, Daniel Le |
2005-09-27 |
$4,743,000 |
| 6841943 |
Plasma processor with electrode simultaneously responsive to plural frequencies |
Vahid Vahedi, Albert R. Ellingboe, Andras Kuthi, Andreas Fischer |
2005-01-11 |
$12,803,000 |
| 6822185 |
Temperature controlled dome-coil system for high power inductively coupled plasma systems |
Michael Welch, Paul Luscher, Siamak Salimian, Rolf Guenther, Zhong Qiang Hua +1 more |
2004-11-23 |
$17,815,000 |
| 6755150 |
Multi-core transformer plasma source |
Canfeng Lai, Michael S. Cox, Tsutomu Tanaka, Shamouil Shamouilian |
2004-06-29 |
$252,234,000 |
| 6744212 |
Plasma processing apparatus and method for confining an RF plasma under very high gas flow and RF power density conditions |
Andreas Fischer, Dave Trussell, Bill Kennedy |
2004-06-01 |
$10,167,000 |
