Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7892445 | Wafer electrical discharge control using argon free dechucking gas | David Wei, Masahiro Watanabe, Sean S. Kang, Kenji Takeshita, Mayumi Block +2 more | 2011-02-22 |
| 7385287 | Preventing damage to low-k materials during resist stripping | Siyi Li, Helen Zhu, Thomas S. Choi, Peter Loewenhardt | 2008-06-10 |
| 7226852 | Preventing damage to low-k materials during resist stripping | Siyi Li, Helen Zhu, Thomas S. Choi, Peter Loewenhardt | 2007-06-05 |