Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11437242 | Selective removal of silicon-containing materials | Jungmin Ko, Kwang Soo Kim, Nitin K. Ingle | 2022-09-06 |
| 8815745 | Reducing damage to low-K materials during photoresist stripping | Sean S. Kang, Sang-Jun Cho | 2014-08-26 |
| 7534363 | Method for providing uniform removal of organic material | Rao Annapragada, Odette Turmel, Kenji Takeshita, Lily Zheng, David R. Pirkle | 2009-05-19 |
| 7385287 | Preventing damage to low-k materials during resist stripping | Siyi Li, Helen Zhu, Howard Dang, Peter Loewenhardt | 2008-06-10 |
| 7294580 | Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition | Seokmin Yun, Ji Zhu, Peter Cirigliano, Sangheon Lee, Peter Loewenhardt +4 more | 2007-11-13 |
| 7226852 | Preventing damage to low-k materials during resist stripping | Siyi Li, Helen Zhu, Howard Dang, Peter Loewenhardt | 2007-06-05 |
| 6461974 | High temperature tungsten etching process | Tuqiang Ni, Kenji Takeshita | 2002-10-08 |
| 6197388 | Methods of preventing post-etch corrosion of an aluminum neodymium-containing layer | John Holland, Nancy Tran | 2001-03-06 |