Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8222155 | Selectivity control in a plasma processing system | Kenji Takeshita, Felix Kozakevich, Eric A. Hudson | 2012-07-17 |
| 7981699 | Method for tunably repairing low-k dielectric damage | Stephen M. Sirard, James DeYoung | 2011-07-19 |
| 7534363 | Method for providing uniform removal of organic material | Rao Annapragada, Kenji Takeshita, Lily Zheng, Thomas S. Choi, David R. Pirkle | 2009-05-19 |
| 7521362 | Methods for the optimization of ion energy control in a plasma processing system | Kenji Takeshita, Felix Kozakevich, Eric A. Hudson | 2009-04-21 |