SS

Stephen M. Sirard

Lam Research: 14 patents #202 of 2,128Top 10%
🗺 Texas: #9,719 of 125,132 inventorsTop 8%
Overall (All Time): #308,390 of 4,157,543Top 8%
15
Patents All Time

Issued Patents All Time

Showing 1–15 of 15 patents

Patent #TitleCo-InventorsDate
12322588 Stimulus responsive polymer films and formulations Gregory Blachut, Diane Hymes 2025-06-03
12119218 Sacrificial protection layer for environmentally sensitive surfaces of substrates Ratchana Limary, Yang Pan, Diane Hymes 2024-10-15
11862473 Controlled degradation of a stimuli-responsive polymer film Gregory Blachut, Diane Hymes 2024-01-02
10068781 Systems and methods for drying high aspect ratio structures without collapse using sacrificial bracing material that is removed using hydrogen-rich plasma Ilia Kalinovski, Jeff Hahn 2018-09-04
10008396 Method for collapse-free drying of high aspect ratio structures Ratchana Limary 2018-06-26
9773649 Dry development and image transfer of si-containing self-assembled block copolymers 2017-09-26
9673037 Substrate freeze dry apparatus and method Diane Hymes, Alan M. Schoepp 2017-06-06
9666427 Method of collapse-free drying of high aspect ratio structures Diane Hymes, Olivier Postel 2017-05-30
9466511 Systems and methods for drying high aspect ratio structures without collapse using stimuli-responsive sacrificial bracing material Ratchana Limary 2016-10-11
8898928 Delamination drying apparatus and method Diane Hymes, Alan M. Schoepp, Ratchana Limary 2014-12-02
8691701 Strip with reduced low-K dielectric damage Bing Ji, Andrew D. Bailey, III, Maryam Moravej 2014-04-08
8236188 Method for low-K dielectric etch with reduced damage Bing Ji, Kenji Takeshita, Andrew D. Bailey, III, Eric A. Hudson, Maryam Moravej +6 more 2012-08-07
8114780 Method for dielectric material removal between conductive lines Mayumi Block, Robert C. Hefty, Kenji Takeshita 2012-02-14
7981699 Method for tunably repairing low-k dielectric damage James DeYoung, Odette Turmel 2011-07-19
7892445 Wafer electrical discharge control using argon free dechucking gas David Wei, Howard Dang, Masahiro Watanabe, Sean S. Kang, Kenji Takeshita +2 more 2011-02-22