Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322588 | Stimulus responsive polymer films and formulations | Gregory Blachut, Diane Hymes | 2025-06-03 |
| 12119218 | Sacrificial protection layer for environmentally sensitive surfaces of substrates | Ratchana Limary, Yang Pan, Diane Hymes | 2024-10-15 |
| 11862473 | Controlled degradation of a stimuli-responsive polymer film | Gregory Blachut, Diane Hymes | 2024-01-02 |
| 10068781 | Systems and methods for drying high aspect ratio structures without collapse using sacrificial bracing material that is removed using hydrogen-rich plasma | Ilia Kalinovski, Jeff Hahn | 2018-09-04 |
| 10008396 | Method for collapse-free drying of high aspect ratio structures | Ratchana Limary | 2018-06-26 |
| 9773649 | Dry development and image transfer of si-containing self-assembled block copolymers | — | 2017-09-26 |
| 9673037 | Substrate freeze dry apparatus and method | Diane Hymes, Alan M. Schoepp | 2017-06-06 |
| 9666427 | Method of collapse-free drying of high aspect ratio structures | Diane Hymes, Olivier Postel | 2017-05-30 |
| 9466511 | Systems and methods for drying high aspect ratio structures without collapse using stimuli-responsive sacrificial bracing material | Ratchana Limary | 2016-10-11 |
| 8898928 | Delamination drying apparatus and method | Diane Hymes, Alan M. Schoepp, Ratchana Limary | 2014-12-02 |
| 8691701 | Strip with reduced low-K dielectric damage | Bing Ji, Andrew D. Bailey, III, Maryam Moravej | 2014-04-08 |
| 8236188 | Method for low-K dielectric etch with reduced damage | Bing Ji, Kenji Takeshita, Andrew D. Bailey, III, Eric A. Hudson, Maryam Moravej +6 more | 2012-08-07 |
| 8114780 | Method for dielectric material removal between conductive lines | Mayumi Block, Robert C. Hefty, Kenji Takeshita | 2012-02-14 |
| 7981699 | Method for tunably repairing low-k dielectric damage | James DeYoung, Odette Turmel | 2011-07-19 |
| 7892445 | Wafer electrical discharge control using argon free dechucking gas | David Wei, Howard Dang, Masahiro Watanabe, Sean S. Kang, Kenji Takeshita +2 more | 2011-02-22 |