RL

Ratchana Limary

Lam Research: 4 patents #662 of 2,128Top 35%
Overall (All Time): #1,116,915 of 4,157,543Top 30%
4
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12119218 Sacrificial protection layer for environmentally sensitive surfaces of substrates Stephen M. Sirard, Yang Pan, Diane Hymes 2024-10-15
10008396 Method for collapse-free drying of high aspect ratio structures Stephen M. Sirard 2018-06-26
9466511 Systems and methods for drying high aspect ratio structures without collapse using stimuli-responsive sacrificial bracing material Stephen M. Sirard 2016-10-11
8898928 Delamination drying apparatus and method Stephen M. Sirard, Diane Hymes, Alan M. Schoepp 2014-12-02