Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372872 | Extreme ultraviolet (EUV) lithography using an intervening layer or a multi-layer stack with varying mean free paths for secondary electron generation | Andrew Xiao Liang, Nader Shamma, Rich Wise, Akhil Singhal, Arpan Mahorowala +1 more | 2025-07-29 |
| 12322588 | Stimulus responsive polymer films and formulations | Diane Hymes, Stephen M. Sirard | 2025-06-03 |
| 11862473 | Controlled degradation of a stimuli-responsive polymer film | Stephen M. Sirard, Diane Hymes | 2024-01-02 |
| 11065654 | In situ vapor deposition polymerization to form polymers as precursors to viscoelastic fluids for particle removal from substrates | Mark Kawaguchi | 2021-07-20 |
| 11008481 | Polymer brush reflow for directed self-assembly of block copolymer thin films | XiaoMin Yang, Austin Lane, Michael J. Maher | 2021-05-18 |
| 10239982 | Block polymers for sub-10 nm patterning | Carlton G. Willson, Michael J. Maher, Yusuke Asano, Christopher John Ellison | 2019-03-26 |