Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372872 | Extreme ultraviolet (EUV) lithography using an intervening layer or a multi-layer stack with varying mean free paths for secondary electron generation | Andrew Xiao Liang, Nader Shamma, Akhil Singhal, Arpan Mahorowala, Gregory Blachut +1 more | 2025-07-29 |
| 10885253 | System and method for determining dimensional range of repairable defects by deposition and etching in a virtual fabrication environment | Daniel N. Sobieski, Yang Pan, David M. Fried, Jiangjiang Gu | 2021-01-05 |
| 8048325 | Method and apparatus for multilayer photoresist dry development | Vaidyanathan Balasubramaniam, Koichiro Inazawa, Rie Inazawa, Arpan Mahorawala, Siddhartha Panda | 2011-11-01 |
| 7344991 | Method and apparatus for multilayer photoresist dry development | Vaidyanathan Balasubramaniam, Koichiro Inazawa, Arpan Mahorowala, Siddhartha Panda | 2008-03-18 |