| 12423486 |
System and method for process window optimization in a virtual semiconductor device fabrication environment |
William J. Egan, Anshuman Kunwar, Kenneth B. Greiner |
2025-09-23 |
|
| 11861289 |
System and method for performing process model calibration in a virtual semiconductor device fabrication environment |
William J. Egan, Kenneth B. Greiner, Anshuman Kunwar |
2024-01-02 |
|
| 11836429 |
Determination of recipes for manufacturing semiconductor devices |
Kapil Sawlani, Atashi Basu, Michal Danek, Emily Ann Alden |
2023-12-05 |
$84,518,000 |
| 11630937 |
System and method for predictive 3-D virtual fabrication |
Kenneth B. Greiner, Stephen R. Breit, Daniel Faken |
2023-04-18 |
|
| 11624981 |
Resist and etch modeling |
Saravanapriyan Sriraman |
2023-04-11 |
$552,428,000 |
| 11144701 |
System and method for key parameter identification, process model calibration and variability analysis in a virtual semiconductor device fabrication environment |
William J. Egan, Kenneth B. Greiner, Anshuman Kunwar |
2021-10-12 |
|
| 11074388 |
System and method for predictive 3-D virtual fabrication |
Kenneth B. Greiner, Stephen R. Breit, Daniel Faken |
2021-07-27 |
|
| 11048847 |
System and method for performing a multi-etch process using material-specific behavioral parameters in a 3-D virtual fabrication environment |
Kenneth B. Greiner, Daniel Faken, Stephen R. Breit |
2021-06-29 |
|
| 10977405 |
Fill process optimization using feature scale modeling |
Michael J. Bowes, Atashi Basu, Kapil Sawlani, Dongyao Li, Anand Chandrashekar +1 more |
2021-04-13 |
$221,486,000 |
| 10885253 |
System and method for determining dimensional range of repairable defects by deposition and etching in a virtual fabrication environment |
Daniel N. Sobieski, Rich Wise, Yang Pan, Jiangjiang Gu |
2021-01-05 |
|
| 10762267 |
System and method for electrical behavior modeling in a 3D virtual fabrication environment |
Mattan Kamon, Kenneth B. Greiner, Vasanth Allampalli, Yiguang Yan |
2020-09-01 |
|
| 10242142 |
Predictive 3-D virtual fabrication system and method |
Kenneth B. Greiner, Stephen R. Breit, Daniel Faken |
2019-03-26 |
|
| 9965577 |
System and method for performing directed self-assembly in a 3-D virtual fabrication environment |
Mattan Kamon, Kenneth B. Greiner |
2018-05-08 |
|
| 9659126 |
Modeling pattern dependent effects for a 3-D virtual semiconductor fabrication environment |
Kenneth B. Greiner, Mattan Kamon, Daniel Faken |
2017-05-23 |
|
| 9317632 |
System and method for modeling epitaxial growth in a 3-D virtual fabrication environment |
Daniel Faken, Kenneth B. Greiner, Stephen R. Breit |
2016-04-19 |
|
| 9087928 |
High density memory cells using lateral epitaxy |
Roger A. Booth, Jr., Kangguo Cheng, Joseph Ervin, Byeong Y. Kim, Chengwen Pei +2 more |
2015-07-21 |
$2,242,000 |
| 8959464 |
Multi-etch process using material-specific behavioral parameters in 3-D virtual fabrication environment |
Kenneth B. Greiner, Daniel Faken, Stephen R. Breit |
2015-02-17 |
|
| 8829585 |
High density memory cells using lateral epitaxy |
Roger A. Booth, Jr., Kangguo Cheng, Joseph Ervin, Byeong Y. Kim, Chengwen Pei +2 more |
2014-09-09 |
$5,167,000 |
| 8832620 |
Rule checks in 3-D virtual fabrication environment |
Kenneth B. Greiner, Mark J. Stock, Stephen R. Breit |
2014-09-09 |
|
| 8809953 |
FET structures with trench implantation to improve back channel leakage and body resistance |
Jeffrey B. Johnson, Kevin McStay, Paul C. Parries, Chengwen Pei, Gan Wang +2 more |
2014-08-19 |
$3,895,000 |
| 8610451 |
Post silicide testing for replacement high-k metal gate technologies |
Ishtiaq Ahsan, Lidor Goren, Jiun-Hsin Liao |
2013-12-17 |
$6,242,000 |
| 8598683 |
Semiconductor structure having varactor with parallel DC path adjacent thereto |
Edward J. Nowak |
2013-12-03 |
$7,507,000 |
| 8236632 |
FET structures with trench implantation to improve back channel leakage and body resistance |
Jeffrey B. Johnson, Kevin McStay, Paul C. Parries, Chengwen Pei, Gan Wang +2 more |
2012-08-07 |
$7,112,000 |
| 8232624 |
Semiconductor structure having varactor with parallel DC path adjacent thereto |
Joseph E. Nowak |
2012-07-31 |
$5,473,000 |
| 8120138 |
High-Z structure and method for co-alignment of mixed optical and electron beam lithographic fabrication levels |
John Michael Hergenrother, Sharee McNab, Michael J. Rooks, Anna W. Topol |
2012-02-21 |
$5,017,000 |
