Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11836429 | Determination of recipes for manufacturing semiconductor devices | Atashi Basu, David M. Fried, Michal Danek, Emily Ann Alden | 2023-12-05 |
| 11263737 | Defect classification and source analysis for semiconductor equipment | Richard A. Gottscho, Michal Danek, Keith Wells, Keith J. Hansen | 2022-03-01 |
| 11225712 | Atomic layer deposition of tungsten for enhanced fill and reduced substrate attack | Joshua Collins, Siew Neo, Hanna Bamnolker | 2022-01-18 |
| 10977405 | Fill process optimization using feature scale modeling | Michael J. Bowes, Atashi Basu, Dongyao Li, Anand Chandrashekar, David M. Fried +1 more | 2021-04-13 |
| 10895539 | In-situ chamber clean end point detection systems and methods using computer vision systems | Gary Lind, Michal Danek, Ronald Powell, Michael Rumer, Kaihan Ashtiani | 2021-01-19 |
| 10214807 | Atomic layer deposition of tungsten for enhanced fill and reduced substrate attack | Joshua Collins, Siew Neo, Hanna Bamnolker | 2019-02-26 |