Issued Patents All Time
Showing 1–25 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278125 | Integrated dry processes for patterning radiation photoresist patterning | Jengyi Yu, Samantha Tan, Mohammed Haroon Alvi, Richard Wise, Yang Pan +5 more | 2025-04-15 |
| 12217945 | Sorption chamber walls for semiconductor equipment | Hossein Sadeghi | 2025-02-04 |
| 12183604 | Integrated dry processes for patterning radiation photoresist patterning | Jengyi Yu, Samantha Tan, Mohammed Haroon Alvi, Richard Wise, Yang Pan +5 more | 2024-12-31 |
| 12105422 | Photoresist development with halide chemistries | Samantha Tan, Jengyi Yu, Da Li, Yiwen FAN, Yang Pan +5 more | 2024-10-01 |
| 11520953 | Predicting etch characteristics in thermal etching and atomic layer etching | Thorsten Lill, Andreas Fischer, Ivan L. Berry, III, Nerissa Draeger | 2022-12-06 |
| 11276564 | Plasma processing system having an inspection tool and controller that interfaces with a tool model | — | 2022-03-15 |
| 11263737 | Defect classification and source analysis for semiconductor equipment | Kapil Sawlani, Michal Danek, Keith Wells, Keith J. Hansen | 2022-03-01 |
| 11209729 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Dennis M. Hausmann, Adrien LaVoie, Thomas Knisley +3 more | 2021-12-28 |
| 10831096 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Dennis M. Hausmann, Adrien LaVoie, Thomas Knisley +3 more | 2020-11-10 |
| 10697874 | Estimation of lifetime remaining for a consumable-part in a semiconductor manufacturing chamber | — | 2020-06-30 |
| 10615009 | System implementing machine learning in complex multivariate wafer processing equipment | Joydeep Guha, John Daugherty, Vahid Vahedi | 2020-04-07 |
| 10585347 | Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework | Saravanapriyan Sriraman, Richard Wise, Harmeet Singh, Alex Paterson, Andrew D. Bailey, III +1 more | 2020-03-10 |
| 10514598 | Vacuum-integrated hardmask processes and apparatus | Jeffrey Marks, George Andrew Antonelli, Dennis M. Hausmann, Adrien LaVoie, Thomas Knisley +3 more | 2019-12-24 |
| 10424460 | Systems, methods and apparatus for choked flow element extraction | Ali Shajii, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William Robert Entley | 2019-09-24 |
| 10386828 | Methods and apparatuses for etch profile matching by surface kinetic model optimization | Mehmet Derya Tetiker, Saravanapriyan Sriraman, Andrew D. Bailey, III, Juline Shoeb, Alex Paterson | 2019-08-20 |
| 10332727 | Methods for processing substrates using small plasma chambers | Rajinder Dhindsa, Mukund Srinivasan | 2019-06-25 |
| 10303830 | Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization | Mehmet Derya Tetiker, Saravanapriyan Sriraman, Andrew D. Bailey, III, Alex Paterson | 2019-05-28 |
| 10283325 | Distributed multi-zone plasma source systems, methods and apparatus | Ali Shajii, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William Robert Entley | 2019-05-07 |
| 10269545 | Methods for monitoring plasma processing systems for advanced process and tool control | — | 2019-04-23 |
| 10197908 | Photoresist design layout pattern proximity correction through fast edge placement error prediction via a physics-based etch profile modeling framework | Saravanapriyan Sriraman, Richard Wise, Harmeet Singh, Alex Paterson, Andrew D. Bailey, III +1 more | 2019-02-05 |
| 10041868 | Estimation of lifetime remaining for a consumable-part in a semiconductor manufacturing chamber | — | 2018-08-07 |
| 9996647 | Methods and apparatuses for etch profile optimization by reflectance spectra matching and surface kinetic model optimization | Mehmet Derya Tetiker, Saravanapriyan Sriraman, Andrew D. Bailey, III, Alex Paterson | 2018-06-12 |
| 9972478 | Method and process of implementing machine learning in complex multivariate wafer processing equipment | Joydeep Guha, John Daugherty, Vahid Vahedi | 2018-05-15 |
| 9967965 | Distributed, concentric multi-zone plasma source systems, methods and apparatus | Ali Shajii, Souheil Benzerrouk, Andrew Cowe, Siddharth P. Nagarkatti, William Robert Entley | 2018-05-08 |
| 9966231 | Direct current pulsing plasma systems | Roderick Boswell | 2018-05-08 |