JG

Joydeep Guha

Lam Research: 18 patents #151 of 2,128Top 8%
Overall (All Time): #254,492 of 4,157,543Top 7%
18
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
10622189 Adjustable side gas plenum for edge rate control in a downstream reactor Andrew Stratton Bravo, Jatinder Kumar 2020-04-14
10615009 System implementing machine learning in complex multivariate wafer processing equipment John Daugherty, Vahid Vahedi, Richard A. Gottscho 2020-04-07
10242883 High aspect ratio etch of oxide metal oxide metal stack Sirish Reddy, Kaushik Chattopadhyay, Thomas W. Mountsier, Aaron Eppler, Thorsten Lill +2 more 2019-03-26
10134605 Dual chamber plasma etcher with ion accelerator 2018-11-20
9972478 Method and process of implementing machine learning in complex multivariate wafer processing equipment John Daugherty, Vahid Vahedi, Richard A. Gottscho 2018-05-15
9899227 System, method and apparatus for ion milling in a plasma etch chamber Butsurin Jinnai, Jun Hee HAN, Aaron Eppler 2018-02-20
9870932 Pressure purge etch method for etching complex 3-D structures Pilyeon Park 2018-01-16
9837286 Systems and methods for selectively etching tungsten in a downstream reactor Dengliang Yang, Helen Zhu, George Matamis, Brad Jacobs, Joon Hong Park 2017-12-05
9659783 High aspect ratio etch with combination mask Sirish Reddy, Kaushik Chattopadhyay, Thomas W. Mountsier, Aaron Eppler, Thorsten Lill +2 more 2017-05-23
9601319 Systems and methods for eliminating flourine residue in a substrate processing chamber using a plasma-based process Andrew Stratton Bravo, Amit Pharkya 2017-03-21
9514955 Patterning of a hard mask material Camelia Rusu 2016-12-06
9431269 Dual chamber plasma etcher with ion accelerator 2016-08-30
9147581 Dual chamber plasma etcher with ion accelerator 2015-09-29
9082826 Methods and apparatuses for void-free tungsten fill in three-dimensional semiconductor features Anand Chandrashekar, Raashina Humayun, Hua Xiang 2015-07-14
9018103 High aspect ratio etch with combination mask Sirish Reddy, Kaushik Chattopadhyay, Thomas W. Mountsier, Aaron Eppler, Thorsten Lill +2 more 2015-04-28
8895323 Method of forming a magnetoresistive random-access memory device 2014-11-25
8784676 Waferless auto conditioning Sanket Sant, Butsurin Jinnai 2014-07-22
8608973 Layer-layer etch of non volatile materials using plasma 2013-12-17