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Dual chamber plasma etcher with ion accelerator |
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2018-11-20 |
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Method and process of implementing machine learning in complex multivariate wafer processing equipment |
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Dual chamber plasma etcher with ion accelerator |
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Dual chamber plasma etcher with ion accelerator |
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2015-09-29 |
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High aspect ratio etch with combination mask |
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2014-11-25 |
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Waferless auto conditioning |
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Layer-layer etch of non volatile materials using plasma |
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2013-12-17 |