| 12270748 |
Method and apparatus for measuring particles |
Amir A. Yasseri, Girish M. HUNDI, John Michael Kerns, Duane Outka, Cliff La Croix |
2025-04-08 |
|
| 12249490 |
Single crystal metal oxide plasma chamber component |
Lin Xu, Douglas DETERT, Pankaj HAZARIKA, Satish SRINIVASAN, Nash W. ANDERSON +5 more |
2025-03-11 |
|
| 12198902 |
Laminated aerosol deposition coating for aluminum components for plasma processing chambers |
Lin Xu, Satish SRINIVASAN, David Joseph WETZEL |
2025-01-14 |
|
| 12129569 |
Method for conditioning semiconductor processing chamber components |
Lin Xu, David Joseph WETZEL, Hong Shih, Satish SRINIVASAN, Yuanping Song +3 more |
2024-10-29 |
$201,698,000 |
| 12087561 |
Vacuum pump protection against deposition byproduct buildup |
John Drewery, Tom A. Kamp, Haoquan Yan, Ali Sucipto Tan, Ming-Kuei Tseng +1 more |
2024-09-10 |
$144,237,000 |
| 12072318 |
Chamber component cleanliness measurement system |
Amir A. Yasseri, Duane Outka, Armen Avoyan, Kennet Baylon, Girish M. HUNDI +1 more |
2024-08-27 |
$110,858,000 |
| 12064795 |
Conditioning chamber component |
Amir A. Yasseri, Hong Shih, Duane Outka, Lin Xu, Armen Avoyan +2 more |
2024-08-20 |
$266,541,000 |
| 11764086 |
Wafer transport assembly with integrated buffers |
David Trussell, Christopher Pena, Michael C. Kellogg, Klay Kunkel, Richard H. Gould |
2023-09-19 |
$348,165,000 |
| 11710623 |
Vacuum pump protection against deposition byproduct buildup |
John Drewery, Tom A. Kamp, Haoquan Yan, Ali Sucipto Tan, Ming-Kuei Tseng +1 more |
2023-07-25 |
$825,741,000 |
| 11662237 |
MEMS coriolis gas flow controller |
Iqbal Shareef, Dennis R. Smith |
2023-05-30 |
$234,512,000 |
| 11393705 |
Wafer transport assembly with integrated buffers |
David Trussell, Michael C. Kellogg, Christopher Pena, Richard H. Gould, Klay Kunkel |
2022-07-19 |
$257,481,000 |
| 11124659 |
Method to selectively pattern a surface for plasma resistant coat applications |
Amir A. Yasseri, Duane Outka, Hong Shih |
2021-09-21 |
$178,243,000 |
| 11112773 |
Systems for removing and replacing consumable parts from a semiconductor process module in situ |
David Trussell, Alan J. Miller, Alex Paterson |
2021-09-07 |
$360,735,000 |
| 11087961 |
Quartz component with protective coating |
Lin Xu, Robin KOSHY, Satish SRINIVASAN, David Joseph WETZEL |
2021-08-10 |
$172,238,000 |
| 11031215 |
Vacuum pump protection against deposition byproduct buildup |
John Drewery, Tom A. Kamp, Haoquan Yan, Ali Sucipto Tan, Ming-Kuei Tseng +1 more |
2021-06-08 |
$197,833,000 |
| 10967407 |
Conditioning chamber component |
Amir A. Yasseri, Hong Shih, Duane Outka, Lin Xu, Armen Avoyan +2 more |
2021-04-06 |
$236,818,000 |
| 10964514 |
Electrode for plasma processing chamber |
Evan E. Patton |
2021-03-30 |
$460,773,000 |
| 10914003 |
Monolithic gas distribution manifold and various construction techniques and use cases therefor |
Andrew C. Lee, Michael C. Kellogg, Christopher Pena |
2021-02-09 |
$279,311,000 |
| 10790174 |
Wafer transport assembly with integrated buffers |
David Trussell, Michael C. Kellogg, Christopher Pena, Richard H. Gould, Klay Kunkel |
2020-09-29 |
$243,427,000 |
| 10615009 |
System implementing machine learning in complex multivariate wafer processing equipment |
Joydeep Guha, Vahid Vahedi, Richard A. Gottscho |
2020-04-07 |
$73,869,000 |
| 10557197 |
Monolithic gas distribution manifold and various construction techniques and use cases therefor |
Andrew C. Lee, Michael C. Kellogg, Christopher Pena |
2020-02-11 |
$69,577,000 |
| 10304707 |
Load lock interface and integrated post-processing module |
David Trussell, Richard H. Gould |
2019-05-28 |
$16,840,000 |
| 10014196 |
Wafer transport assembly with integrated buffers |
David Trussell, Michael C. Kellogg, Christopher Pena, Richard H. Gould, Klay Kunkel |
2018-07-03 |
$27,916,000 |
| 9972478 |
Method and process of implementing machine learning in complex multivariate wafer processing equipment |
Joydeep Guha, Vahid Vahedi, Richard A. Gottscho |
2018-05-15 |
$34,519,000 |
| 9947558 |
Method for conditioning silicon part |
Lin Xu, Hong Shih, Robin KOSHY, Satish SRINIVASAN |
2018-04-17 |
$35,271,000 |
