Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249490 | Single crystal metal oxide plasma chamber component | Lin Xu, Douglas DETERT, John Daugherty, Pankaj HAZARIKA, Satish SRINIVASAN +5 more | 2025-03-11 |
| 11087961 | Quartz component with protective coating | Lin Xu, John Daugherty, Satish SRINIVASAN, David Joseph WETZEL | 2021-08-10 |
| 9947558 | Method for conditioning silicon part | Lin Xu, Hong Shih, John Daugherty, Satish SRINIVASAN | 2018-04-17 |
| 9028918 | Forming a hardmask capping layer | — | 2015-05-12 |
| 8900665 | Method of forming hardmask layer with alternating nanolayers | — | 2014-12-02 |