Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249501 | Susceptor manufacturing method and the manufactured susceptor using the same | Hoyoun Jang | 2025-03-11 |
| 11610800 | Capacitive method of detecting wafer chucking and de-chucking | Job George Konnoth Joseph, Syam Sundeep Boosa, Rupankar Choudhury | 2023-03-21 |
| 11501957 | Pedestal support design for precise chamber matching and process control | Alexander S. Polyak, Sanjeev Baluja | 2022-11-15 |
| 11098404 | Multi-station chamber lid with precise temperature and flow control | Dhritiman Subha Kashyap, Sanjeev Baluja, Michael R. Rice | 2021-08-24 |
| 10679827 | Method and apparatus for semiconductor processing chamber isolation for reduced particles and improved uniformity | Ravikumar Patil, Hanish Kumar Panavalappil Kumarankutty, Somil KAPADIA, Sonny Kunnakkat | 2020-06-09 |