Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984302 | Magnetic-material shield around plasma chambers near pedestal | Sathya Swaroop Ganta, Kallol Bera, Andrew Nguyen, Jay D. Pinson, II, Akshay Dhanakshirur +6 more | 2024-05-14 |
| 11862475 | Gas mixer to enable RPS purging | Fang Ruan, Diwakar Kedlaya, Amit Kumar BANSAL, Venkata Sharat Chandra Parimi, Rajaram Narayanan +3 more | 2024-01-02 |
| 11610800 | Capacitive method of detecting wafer chucking and de-chucking | Syam Sundeep Boosa, Gopu Krishna, Rupankar Choudhury | 2023-03-21 |