| 12488231 |
System and method for tag-directed deep-learning-based features for predicting events and making determinations |
Suraj Jayakumar, Chao Cheng |
2025-12-02 |
|
| 12347653 |
Uniform in situ cleaning and deposition |
Saket Rathi, Tuan Nguyen, Yuxing Zhang, Badri Narayan Ramamurthi, Nitin Pathak +2 more |
2025-07-01 |
|
| 12340984 |
Radio frequency power return path |
Luke Bonecutter, David Blahnik, Tuan Nguyen |
2025-06-24 |
|
| 12183553 |
Baffle implementation for improving bottom purge gas flow uniformity |
Nitin Pathak, Kartik Shah, Tuan Nguyen, Juan Carlos Rocha, David Blahnik |
2024-12-31 |
$49,330,000 |
| 12110590 |
Faceplate having a curved surface |
Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur, Daemian Raj Benjamin Raj, Juan Carlos Rocha-Alvarez +5 more |
2024-10-08 |
$69,128,000 |
| 12087555 |
Method and system for cleaning a process chamber |
Kalyanjit Ghosh, Shailendra Srivastava, Tejas Ulavi, Yusheng Zhou, Sanjeev Baluja |
2024-09-10 |
$81,152,000 |
| 12060637 |
Actively cooled foreline trap to reduce throttle valve drift |
Gaosheng Fu, Tuan Nguyen, Karthik Janakiraman, Juan Carlos Rocha-Alvarez |
2024-08-13 |
$69,975,000 |
| 12050972 |
Preservation of causal information for machine learning |
Thomas Rosati, Tittu Thomas Nellimoottil |
2024-07-30 |
|
| 12012653 |
Cleaning assemblies for substrate processing chambers |
Yuxing Zhang, Tuan Nguyen, Nitin Pathak, Saket Rathi, Thomas Rubio +3 more |
2024-06-18 |
$83,264,000 |
| 11952663 |
Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater |
Nitin Pathak, Tuan Nguyen, Badri Narayan Ramamurthi, Thomas Rubio, Juan Carlos Rocha-Alvarez |
2024-04-09 |
$47,694,000 |
| 11952660 |
Semiconductor processing chambers and methods for cleaning the same |
Nitin Pathak, Yuxing Zhang, Tuan Nguyen, Kalyanjit Ghosh, Juan Carlos Rocha-Alvarez |
2024-04-09 |
$47,694,000 |
| 11908662 |
Device and method for tuning plasma distribution using phase control |
Xiaopu Li, Kallol Bera, Edward P. Hammond, IV, Jonghoon Baek, Jun Ma +1 more |
2024-02-20 |
$66,055,000 |
| 11898249 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more |
2024-02-13 |
$47,589,000 |
| 11862475 |
Gas mixer to enable RPS purging |
Fang Ruan, Diwakar Kedlaya, Venkata Sharat Chandra Parimi, Rajaram Narayanan, Badri Narayan Ramamurthi +3 more |
2024-01-02 |
$40,045,000 |
| 11851759 |
Faceplate having a curved surface |
Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur, Daemian Raj Benjamin Raj, Juan Carlos Rocha-Alvarez +5 more |
2023-12-26 |
$30,871,000 |
| 11827980 |
Isolator apparatus and methods for substrate processing chambers |
Nitin Pathak, Tuan Nguyen, Thomas Rubio, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez |
2023-11-28 |
$39,424,000 |
| 11742235 |
Coaxial lift device with dynamic leveling |
Jason M. Schaller, Jeffrey Blahnik |
2023-08-29 |
$78,061,000 |
| 11742185 |
Uniform in situ cleaning and deposition |
Saket Rathi, Tuan Nguyen, Yuxing Zhang, Badri Narayan Ramamurthi, Nitin Pathak +2 more |
2023-08-29 |
$78,061,000 |
| 11699577 |
Treatment for high-temperature cleans |
Sarah Michelle Bobek, Ruiyun Huang, Abdul Aziz Khaja, Dong-Hyung LEE, Ganesh Balasubramanian +6 more |
2023-07-11 |
$39,838,000 |
| 11697877 |
High temperature face plate for deposition application |
Saket Rathi, Tuan Nguyen |
2023-07-11 |
$39,838,000 |
| 11682544 |
Cover wafer for semiconductor processing chamber |
Venkata Sharat Chandra Parimi, Satish Radhakrishnan, Diwakar Kedlaya, Fang Ruan |
2023-06-20 |
$48,645,000 |
| 11656366 |
Apparatus, system and method for generalized multi-mode state machine based localization engine and application of same |
Pengluo Wang, Hairuo Zhuang, Xue Li, Venkatesan Nallampatti Ekambaram, Vignesh Sethuraman |
2023-05-23 |
|
| 11643725 |
Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater |
Nitin Pathak, Tuan Nguyen, Badri Narayan Ramamurthi, Thomas Rubio, Juan Carlos Rocha-Alvarez |
2023-05-09 |
$42,400,000 |
| 11613812 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more |
2023-03-28 |
$69,791,000 |
| 11580475 |
Utilizing artificial intelligence to predict risk and compliance actionable insights, predict remediation incidents, and accelerate a remediation process |
San Retna, Tushant Nayyar, Rithesh Mohan, Rimon Nissan, Jennifer Pham |
2023-02-14 |
$168,913,000 |
