| 12183618 |
Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool |
Sanjeev Baluja, Eric J. Hoffmann, Ashutosh Agarwal |
2024-12-31 |
| 12087555 |
Method and system for cleaning a process chamber |
Kalyanjit Ghosh, Shailendra Srivastava, Yusheng Zhou, Amit Kumar BANSAL, Sanjeev Baluja |
2024-09-10 |
| 12018376 |
Apparatus and methods for motor shaft and heater leveling |
Ashutosh Agarwal, Sanjeev Baluja |
2024-06-25 |
| 12020957 |
Heater assembly with process gap control for batch processing chambers |
Akshay Gunaji, Sanjeev Baluja |
2024-06-25 |
| 11950384 |
Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers |
Akshay Gunaji, Uday Pai, Timothy J. Roggenbuck, Sanjeev Baluja, Kalesh Panchaxari Karadi |
2024-04-02 |
| 11923233 |
Dual-function wafer backside pressure control and edge purge |
Joseph AuBuchon |
2024-03-05 |
| 11791190 |
Apparatus and methods for real-time wafer chucking detection |
Arkaprava Dan, Mike Murtagh, Sanjeev Baluja |
2023-10-17 |
| 11769684 |
Wafer heater with backside and integrated bevel purge |
Vijay D. Parkhe, Naveen Kumar Nagaraja, Sanjeev Baluja, Surajit Kumar, Dhritiman Subha Kashyap +1 more |
2023-09-26 |
| 11682576 |
Pedestal heater for spatial multi-wafer processing tool |
Sanjeev Baluja, Dhritiman Subha Kashyap |
2023-06-20 |
| 11623253 |
In-situ DC plasma for cleaning pedestal heater |
Arkaprava Dan, Sanjeev Baluja, Wei V. Tang |
2023-04-11 |
| 11602064 |
Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers |
Akshay Gunaji, Uday Pai, Timothy J. Roggenbuck, Sanjeev Baluja, Kalesh Panchaxari Karadi |
2023-03-07 |
| 11532462 |
Method and system for cleaning a process chamber |
Kalyanjit Ghosh, Shailendra Srivastava, Yusheng Zhou, Amit Kumar BANSAL, Sanjeev Baluja |
2022-12-20 |
| 11479855 |
Spatial wafer processing with improved temperature uniformity |
Joseph AuBuchon, Sanjeev Baluja, Dhritiman Subha Kashyap, Jared Ahmad Lee, Michael R. Rice |
2022-10-25 |
| 11434569 |
Ground path systems for providing a shorter and symmetrical ground path |
Tuan Nguyen, Jason M. Schaller, Edward P. Hammond, IV, David Blahnik, Amit Kumar BANSAL +3 more |
2022-09-06 |
| 11430686 |
Pedestal heater for spatial multi-wafer processing tool |
Sanjeev Baluja, Dhritiman Subha Kashyap |
2022-08-30 |
| 11260432 |
In-situ DC plasma for cleaning pedestal heater |
Arkaprava Dan, Sanjeev Baluja, Wei V. Tang |
2022-03-01 |
| 11107704 |
Gas input system for a substrate processing chamber |
Thuy Britcher, Amit Kumar BANSAL |
2021-08-31 |
| 11049699 |
Gas box for CVD chamber |
Amit Kumar BANSAL, Nitin Pathak, Ajit Balakrishna |
2021-06-29 |
| 10910243 |
Thermal management system |
Dhritiman Subha Kashyap, Sanjeev Baluja |
2021-02-02 |
| 10910238 |
Heater pedestal assembly for wide range temperature control |
Kaushik Alayavalli, Ajit Balakrishna, Sanjeev Baluja, Amit Kumar BANSAL, Matthew J. Busche +3 more |
2021-02-02 |
| 10787739 |
Spatial wafer processing with improved temperature uniformity |
Joseph AuBuchon, Sanjeev Baluja, Dhritiman Subha Kashyap, Jared Ahmad Lee, Michael R. Rice |
2020-09-29 |
| 10636628 |
Method for cleaning a process chamber |
Kalyanjit Ghosh, Shailendra Srivastava, Yusheng Zhou, Amit Kumar BANSAL, Sanjeev Baluja |
2020-04-28 |
| 10600624 |
System and method for substrate processing chambers |
Kalyanjit Ghosh, Sanjeev Baluja, Mayur Govind Kulkarni, Shailendra Srivastava, Yusheng Zhou +9 more |
2020-03-24 |
