Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183618 | Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool | Sanjeev Baluja, Eric J. Hoffmann, Ashutosh Agarwal | 2024-12-31 |
| 12087555 | Method and system for cleaning a process chamber | Kalyanjit Ghosh, Shailendra Srivastava, Yusheng Zhou, Amit Kumar BANSAL, Sanjeev Baluja | 2024-09-10 |
| 12018376 | Apparatus and methods for motor shaft and heater leveling | Ashutosh Agarwal, Sanjeev Baluja | 2024-06-25 |
| 12020957 | Heater assembly with process gap control for batch processing chambers | Akshay Gunaji, Sanjeev Baluja | 2024-06-25 |
| 11950384 | Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers | Akshay Gunaji, Uday Pai, Timothy J. Roggenbuck, Sanjeev Baluja, Kalesh Panchaxari Karadi | 2024-04-02 |
| 11923233 | Dual-function wafer backside pressure control and edge purge | Joseph AuBuchon | 2024-03-05 |
| 11791190 | Apparatus and methods for real-time wafer chucking detection | Arkaprava Dan, Mike Murtagh, Sanjeev Baluja | 2023-10-17 |
| 11769684 | Wafer heater with backside and integrated bevel purge | Vijay D. Parkhe, Naveen Kumar Nagaraja, Sanjeev Baluja, Surajit Kumar, Dhritiman Subha Kashyap +1 more | 2023-09-26 |
| 11682576 | Pedestal heater for spatial multi-wafer processing tool | Sanjeev Baluja, Dhritiman Subha Kashyap | 2023-06-20 |
| 11623253 | In-situ DC plasma for cleaning pedestal heater | Arkaprava Dan, Sanjeev Baluja, Wei V. Tang | 2023-04-11 |
| 11602064 | Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers | Akshay Gunaji, Uday Pai, Timothy J. Roggenbuck, Sanjeev Baluja, Kalesh Panchaxari Karadi | 2023-03-07 |
| 11532462 | Method and system for cleaning a process chamber | Kalyanjit Ghosh, Shailendra Srivastava, Yusheng Zhou, Amit Kumar BANSAL, Sanjeev Baluja | 2022-12-20 |
| 11479855 | Spatial wafer processing with improved temperature uniformity | Joseph AuBuchon, Sanjeev Baluja, Dhritiman Subha Kashyap, Jared Ahmad Lee, Michael R. Rice | 2022-10-25 |
| 11434569 | Ground path systems for providing a shorter and symmetrical ground path | Tuan Nguyen, Jason M. Schaller, Edward P. Hammond, IV, David Blahnik, Amit Kumar BANSAL +3 more | 2022-09-06 |
| 11430686 | Pedestal heater for spatial multi-wafer processing tool | Sanjeev Baluja, Dhritiman Subha Kashyap | 2022-08-30 |
| 11260432 | In-situ DC plasma for cleaning pedestal heater | Arkaprava Dan, Sanjeev Baluja, Wei V. Tang | 2022-03-01 |
| 11107704 | Gas input system for a substrate processing chamber | Thuy Britcher, Amit Kumar BANSAL | 2021-08-31 |
| 11049699 | Gas box for CVD chamber | Amit Kumar BANSAL, Nitin Pathak, Ajit Balakrishna | 2021-06-29 |
| 10910243 | Thermal management system | Dhritiman Subha Kashyap, Sanjeev Baluja | 2021-02-02 |
| 10910238 | Heater pedestal assembly for wide range temperature control | Kaushik Alayavalli, Ajit Balakrishna, Sanjeev Baluja, Amit Kumar BANSAL, Matthew J. Busche +3 more | 2021-02-02 |
| 10787739 | Spatial wafer processing with improved temperature uniformity | Joseph AuBuchon, Sanjeev Baluja, Dhritiman Subha Kashyap, Jared Ahmad Lee, Michael R. Rice | 2020-09-29 |
| 10636628 | Method for cleaning a process chamber | Kalyanjit Ghosh, Shailendra Srivastava, Yusheng Zhou, Amit Kumar BANSAL, Sanjeev Baluja | 2020-04-28 |
| 10600624 | System and method for substrate processing chambers | Kalyanjit Ghosh, Sanjeev Baluja, Mayur Govind Kulkarni, Shailendra Srivastava, Yusheng Zhou +9 more | 2020-03-24 |