{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Method for cleaning a process chamber", "item": "https://www.patentleaderboard.com/patent/10636628"}]}
Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for cleaning a process chamber

Method for cleaning a process chamber

US Patent 10636628 · Granted Apr 28, 2020

Estimated economic value: $15,875,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System and method for tag-directed deep-learning-based features for predicting e2025
Gas distribution plate2025
Gas distribution plate2025
Methods of operating a spatial deposition tool2025
Plasma showerhead assembly and method of reducing defects2025
Plasma showerhead assembly and method of reducing defects2025
High conductance variable orifice valve2025
Gas distribution plate2025
Uniform in situ cleaning and deposition2025
Radio frequency power return path2025
Gas mixer2025
Dithering or dynamic offsets for improved uniformity2025