Plasma showerhead assembly and method of reducing defects

Assignee

• Applied Materials

Inventors

• Haojiang Chen (3 patents)
• Kenneth Brian Doering (16 patents)
• Sanjeev Baluja (104 patents)
• Unknown
• Kevin Griffin (36 patents)
• Joseph AuBuchon (41 patents)
• Zhenxiu ZHANG (2 patents)
• Unknown
• Tejas Ulavi (24 patents)

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