Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12408239 | PBN heaters for ALD temperature uniformity | Gregory J. Wilson, Karthik Ramanathan, Mario D. Silvetti, Kevin Griffin | 2025-09-02 |
| 12340980 | Plasma showerhead with improved uniformity | Chaowei Wang, Hanhong Chen, Kartik Shah, Kevin Griffin, Hao Zhang | 2025-06-24 |
| 12257592 | Showerhead with embedded nut | — | 2025-03-25 |
| 12057333 | Metrology slot plates | Vivek Shah, Ashutosh Agarwal, Sanjeev Baluja, Shrihari Sampathkumar, Chunlei Zhang | 2024-08-06 |
| 11684941 | Showerhead with embedded nut | — | 2023-06-27 |
| 11584992 | Gas distribution assembly for improved pump-purge and precursor delivery | Mario David Silvetti, Kevin Griffin | 2023-02-21 |
| 11584993 | Thermally uniform deposition station | Jared Ahmad Lee, Sanjeev Baluja, Joseph AuBuchon, Dhritiman Subha Kashyap, Kartik Shah | 2023-02-21 |
| 11577946 | Fail-safe pneumatic lift system | Abhishek Chowdhury, Kevin Griffin, Santhoshkumar Doddegowdanapalya Nanjundegowda, Somashekhar Kosthi, Abhijit Ghosh | 2023-02-14 |
| 11174553 | Gas distribution assembly for improved pump-purge and precursor delivery | Mario David Silvetti, Kevin Griffin | 2021-11-16 |
| 9096930 | Apparatus for manufacturing thin film photovoltaic devices | Robert D. Wieting | 2015-08-04 |
| 8142521 | Large scale MOCVD system for thin film photovoltaic devices | Robert D. Wieting, Jurg Schmitzburger | 2012-03-27 |
| 6818067 | Processing chamber for atomic layer deposition processes | Carl Galewski | 2004-11-16 |
| 6387185 | Processing chamber for atomic layer deposition processes | Carl Galewski, Prasad N. Gadgil, Thomas E. Seidel | 2002-05-14 |
| 6174377 | Processing chamber for atomic layer deposition processes | Carl Galewski, Prasad N. Gadgil, Thomas E. Seidel | 2001-01-16 |
| 5855675 | Multipurpose processing chamber for chemical vapor deposition processes | Carl Galewski | 1999-01-05 |