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Plasma showerhead with improved uniformity |
Chaowei Wang, Hanhong Chen, Kartik Shah, Kevin Griffin, Hao Zhang |
2025-06-24 |
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Showerhead with embedded nut |
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2025-03-25 |
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Vivek Shah, Ashutosh Agarwal, Sanjeev Baluja, Shrihari Sampathkumar, Chunlei Zhang |
2024-08-06 |
| 11684941 |
Showerhead with embedded nut |
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2023-06-27 |
| 11584992 |
Gas distribution assembly for improved pump-purge and precursor delivery |
Mario David Silvetti, Kevin Griffin |
2023-02-21 |
| 11584993 |
Thermally uniform deposition station |
Jared Ahmad Lee, Sanjeev Baluja, Joseph AuBuchon, Dhritiman Subha Kashyap, Kartik Shah |
2023-02-21 |
| 11577946 |
Fail-safe pneumatic lift system |
Abhishek Chowdhury, Kevin Griffin, Santhoshkumar Doddegowdanapalya Nanjundegowda, Somashekhar Kosthi, Abhijit Ghosh |
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Gas distribution assembly for improved pump-purge and precursor delivery |
Mario David Silvetti, Kevin Griffin |
2021-11-16 |
| 9096930 |
Apparatus for manufacturing thin film photovoltaic devices |
Robert D. Wieting |
2015-08-04 |
| 8142521 |
Large scale MOCVD system for thin film photovoltaic devices |
Robert D. Wieting, Jurg Schmitzburger |
2012-03-27 |
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Processing chamber for atomic layer deposition processes |
Carl Galewski |
2004-11-16 |
| 6387185 |
Processing chamber for atomic layer deposition processes |
Carl Galewski, Prasad N. Gadgil, Thomas E. Seidel |
2002-05-14 |
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Processing chamber for atomic layer deposition processes |
Carl Galewski, Prasad N. Gadgil, Thomas E. Seidel |
2001-01-16 |
| 5855675 |
Multipurpose processing chamber for chemical vapor deposition processes |
Carl Galewski |
1999-01-05 |
