Issued Patents All Time
Showing 25 most recent of 99 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12408239 | PBN heaters for ALD temperature uniformity | Kenneth Brian Doering, Karthik Ramanathan, Mario D. Silvetti, Kevin Griffin | 2025-09-02 |
| 12344955 | Electroplating co-planarity improvement by die shielding | Charles Sharbono, Paul R. McHugh, John L. Klocke, Nolan L. Zimmerman | 2025-07-01 |
| 12288677 | Vertically adjustable plasma source | Tsutomu Tanaka, Jared Ahmad Lee, Rakesh Ramadas, Dmitry A. Dzilno, Sriharish Srinivasan | 2025-04-29 |
| 12116686 | Parameter adjustment model for semiconductor processing chambers | Eric J. Bergman, Adam Marc McClure, Paul R. McHugh, John L. Klocke | 2024-10-15 |
| 12104269 | Mechanically-driven oscillating flow agitation | Paul R. McHugh | 2024-10-01 |
| 12087571 | Methods, systems, and apparatus for tape-frame substrate cleaning and drying | Ying Wang, Guan Huei See | 2024-09-10 |
| 11984358 | Systems and methods for improving within die co-planarity uniformity | Paul R. McHugh, Kwan Wook Roh | 2024-05-14 |
| 11982008 | Electroplating system | Paul R. McHugh, Kyle M. Hanson, John L. Klocke, Paul Van Valkenburg, Eric J. Bergman +5 more | 2024-05-14 |
| 11837464 | Methods, systems, and apparatus for tape-frame substrate cleaning and drying | Ying Wang, Guan Huei See | 2023-12-05 |
| 11814744 | Substrate cleaning components and methods in a plating system | Nolan L. Zimmerman, Andrew Anten, Richard W. Plavidal, Eric J. Bergman, Tricia Youngbull +2 more | 2023-11-14 |
| 11705312 | Vertically adjustable plasma source | Tsutomu Tanaka, Jared Ahmad Lee, Rakesh Ramadas, Dmitry A. Dzilno, Sriharish Srinivasan | 2023-07-18 |
| 11697887 | Multi-compartment electrochemical replenishment cell | Nolan L. Zimmerman, Charles Sharbono, Paul R. McHugh, Paul Van Valkenburg, Deepak Saagar Kalaikadal +1 more | 2023-07-11 |
| 11585009 | Mechanically-driven oscillating flow agitation | Paul R. McHugh | 2023-02-21 |
| 11578422 | Electroplating system | Paul R. McHugh, Kyle M. Hanson, John L. Klocke, Paul Van Valkenburg, Eric J. Bergman +5 more | 2023-02-14 |
| 11550224 | Apparatus for post exposure bake | Kyle M. Hanson, Viachslav Babayan | 2023-01-10 |
| 11367653 | Systems and methods for improving within die co-planarity uniformity | Paul R. McHugh, Kwan Wook Roh | 2022-06-21 |
| 11268208 | Electroplating system | Paul R. McHugh, Kyle M. Hanson, John L. Klocke, Paul Van Valkenburg, Eric J. Bergman +5 more | 2022-03-08 |
| 11241718 | Cleaning components and methods in a plating system | Joseph Antony Jonathan, Kyle M. Hanson, Jason Rye, James Emery Brown, Eric J. Bergman +2 more | 2022-02-08 |
| 11230793 | Mechanically-driven oscillating flow agitation | Paul R. McHugh | 2022-01-25 |
| 10837119 | Microelectronic substrate electro processing system | Robert B. Moore, David Silvetti, Paul Z. Wirth, Randy Harris, Daniel J. Woodruff | 2020-11-17 |
| 10754252 | Apparatus for post exposure bake | Kyle M. Hanson, Viachslav Babayan | 2020-08-25 |
| 10655226 | Apparatus and methods to improve ALD uniformity | Paul R. McHugh, Karthik Ramanathan | 2020-05-19 |
| 10577712 | Electroplating apparatus with electrolyte agitation | Paul R. McHugh | 2020-03-03 |
| 10570526 | Electroplating wafers having a pattern induced non-uniformity | Paul R. McHugh | 2020-02-25 |
| 10494731 | Electroplating dynamic edge control | Paul R. McHugh, Daniel J. Woodruff, Marvin L. Bernt | 2019-12-03 |