| 12394604 |
Plasma source with floating electrodes |
Quoc Truong, Dmitry A. Dzilno |
2025-08-19 |
|
| 12033835 |
Modular microwave source with multiple metal housings |
Philip Allan Kraus, James D. Carducci, Richard Fovell, Sathya Swaroop Ganta, Karthikeyan Balaraman +1 more |
2024-07-09 |
$62,454,000 |
| 11899366 |
Method and apparatus for post exposure processing of photoresist wafers |
Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani +2 more |
2024-02-13 |
$47,589,000 |
| 11776793 |
Plasma source with ceramic electrode plate |
Jared Ahmad Lee, Marc Shull, Tsutomu Tanaka, Alexander V. Garachtchenko, Dmitry A. Dzilno |
2023-10-03 |
$34,462,000 |
| 11262662 |
Post exposure processing apparatus |
Viachslav Babayan, Ludovic Godet, Kyle M. Hanson |
2022-03-01 |
$41,046,000 |
| 11112697 |
Method and apparatus for post exposure processing of photoresist wafers |
Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani +2 more |
2021-09-07 |
$49,370,000 |
| 10845715 |
Post exposure processing apparatus |
Viachslav Babayan, Ludovic Godet, Kyle M. Hanson |
2020-11-24 |
$38,395,000 |
| 10837119 |
Microelectronic substrate electro processing system |
David Silvetti, Paul Z. Wirth, Randy Harris, Daniel J. Woodruff, Gregory J. Wilson |
2020-11-17 |
$41,112,000 |
| 10474033 |
Method and apparatus for post exposure processing of photoresist wafers |
Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani +2 more |
2019-11-12 |
$41,829,000 |
| 10401742 |
Post exposure processing apparatus |
Viachslav Babayan, Ludovic Godet, Kyle M. Hanson |
2019-09-03 |
$20,988,000 |
| 10203604 |
Method and apparatus for post exposure processing of photoresist wafers |
Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani +2 more |
2019-02-12 |
$37,465,000 |
| 10087544 |
Microelectronic substrate electro processing system |
David Silvetti, Paul Z. Wirth, Randy Harris |
2018-10-02 |
$29,675,000 |
| 9964863 |
Post exposure processing apparatus |
Viachslav Babayan, Ludovic Godet, Kyle M. Hanson |
2018-05-08 |
$79,246,000 |
| 9714462 |
Vacuum pre-wetting apparatus and methods |
Vincent Steffan Francischetti |
2017-07-25 |
$35,016,000 |
| 9399827 |
Microelectronic substrate electro processing system |
David Silvetti, Paul Z. Wirth, Randy Harris |
2016-07-26 |
$40,439,000 |
| 9245767 |
Anneal module for semiconductor wafers |
Vincent Steffan Francischetti, Gregory J. Wilson, Kyle M. Hanson, Paul Z. Wirth |
2016-01-26 |
$7,094,000 |
| 7997851 |
Apparatus and method for a multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same |
Eric Ruhland, Satish Sundar, Mario David Silvetti |
2011-08-16 |
$17,506,000 |
| 7966210 |
Data distribution method and system |
Stephen A. Hall, David G. Javdan |
2011-06-21 |
|
| 7695232 |
Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same |
Eric Ruhland, Satish Sundar, Mario David Silvetti |
2010-04-13 |
$8,039,000 |
| 7406631 |
Method and apparatus for dynamic performance evaluation of data storage systems |
— |
2008-07-29 |
$602,428,000 |
| 7134053 |
Method and apparatus for dynamic performance evaluation of data storage systems |
— |
2006-11-07 |
$620,966,000 |
| 6048472 |
Production of synthesis gas by mixed conducting membranes |
Shankar Nataraj, Steven Lee Russek |
2000-04-11 |
$87,915,000 |
| 5392594 |
Integrated production of fuel gas and oxygenated organic compounds from synthesis gas |
William P. Hegarty, David Studer, Edward J. Tirados |
1995-02-28 |
$13,335,000 |
| 5280710 |
Continuous process for producing slush hydrogen |
Lee S. Gaumer, Jr., Glenn E. Kinard |
1994-01-25 |
$9,947,000 |
| 5220801 |
Method and apparatus for maintenance of slush mixture at desired level during melt conditions |
David Alexander Butler |
1993-06-22 |
$5,155,000 |
