| 12469720 |
Electroplating wetting chamber with reduced bubble entrapment |
Eric C. Bergman, Gregory Joseph Wilson, Paul R. McHugh, Benjamin BRADLEY, Aaron Paul Juntunen +6 more |
2025-11-11 |
|
| 11982008 |
Electroplating system |
Paul R. McHugh, Gregory J. Wilson, John L. Klocke, Paul Van Valkenburg, Eric J. Bergman +5 more |
2024-05-14 |
$61,768,000 |
| 11788200 |
Fluid recovery in semiconductor processing |
Sam Lee, Eric J. Bergman |
2023-10-17 |
$42,568,000 |
| 11697887 |
Multi-compartment electrochemical replenishment cell |
Nolan L. Zimmerman, Charles Sharbono, Gregory J. Wilson, Paul R. McHugh, Paul Van Valkenburg +1 more |
2023-07-11 |
$39,838,000 |
| 11686005 |
Electroplating systems and methods with increased metal ion concentrations |
Kwan Wook Roh, Charles Sharbono |
2023-06-27 |
$59,089,000 |
| 11578422 |
Electroplating system |
Paul R. McHugh, Gregory J. Wilson, John L. Klocke, Paul Van Valkenburg, Eric J. Bergman +5 more |
2023-02-14 |
$35,617,000 |
| 11551942 |
Methods and apparatus for cleaning a substrate after processing |
Manoj A. Gajendra, Mahadev Joshi, Arvind Thiyagarajan, Jon C. Farr |
2023-01-10 |
$38,290,000 |
| 11550224 |
Apparatus for post exposure bake |
Gregory J. Wilson, Viachslav Babayan |
2023-01-10 |
$38,290,000 |
| 11352711 |
Fluid recovery in semiconductor processing |
Sam Lee, Eric J. Bergman |
2022-06-07 |
$46,649,000 |
| 11274377 |
Seal apparatus for an electroplating system |
Manjunatha Vishwanatha Adagoor, Karthikeyan Balaraman, Karthick Vasu, Shailesh Chouriya |
2022-03-15 |
$44,583,000 |
| 11268208 |
Electroplating system |
Paul R. McHugh, Gregory J. Wilson, John L. Klocke, Paul Van Valkenburg, Eric J. Bergman +5 more |
2022-03-08 |
$69,139,000 |
| 11262662 |
Post exposure processing apparatus |
Viachslav Babayan, Ludovic Godet, Robert B. Moore |
2022-03-01 |
$41,046,000 |
| 11241718 |
Cleaning components and methods in a plating system |
Joseph Antony Jonathan, Jason Rye, James Emery Brown, Gregory J. Wilson, Eric J. Bergman +2 more |
2022-02-08 |
$81,917,000 |
| 11214890 |
Cleaning components and methods in a plating system |
— |
2022-01-04 |
$136,975,000 |
| 10845715 |
Post exposure processing apparatus |
Viachslav Babayan, Ludovic Godet, Robert B. Moore |
2020-11-24 |
$38,395,000 |
| 10840104 |
Controlled etch of nitride features |
Eric J. Bergman, John L. Klocke, Charles Sharbono, Paul R. McHugh |
2020-11-17 |
$41,112,000 |
| 10754252 |
Apparatus for post exposure bake |
Gregory J. Wilson, Viachslav Babayan |
2020-08-25 |
$29,525,000 |
| 10401742 |
Post exposure processing apparatus |
Viachslav Babayan, Ludovic Godet, Robert B. Moore |
2019-09-03 |
$20,988,000 |
| 10240248 |
Adaptive electric field shielding in an electroplating processor using agitator geometry and motion control |
Paul Van Valkenburg, Robert Mikkola, John L. Klocke, Paul R. McHugh, Gregory J. Wilson +1 more |
2019-03-26 |
$22,929,000 |
| 10191379 |
Removing photoresist from a wafer |
Paul R. McHugh, John L. Klocke, Eric J. Bergman, Stuart Crane, Gregory J. Wilson |
2019-01-29 |
$20,450,000 |
| 9984867 |
Systems and methods for rinsing and drying substrates |
Ekaterina A. Mikhaylichenko, Brian J. Brown, Vincent Steffan Francischetti |
2018-05-29 |
$37,048,000 |
| 9964863 |
Post exposure processing apparatus |
Viachslav Babayan, Ludovic Godet, Robert B. Moore |
2018-05-08 |
$79,246,000 |
| 9958782 |
Apparatus for post exposure bake |
Gregory J. Wilson, Viachslav Babayan |
2018-05-01 |
$18,276,000 |
| 9937802 |
Systems and methods for determining a duty cycle for a variable voltage converter |
Daniel Richard Luedtke, Yulei Chen, Fazal Urrahman Syed, Wei Xu |
2018-04-10 |
$4,546,000 |
| 9864283 |
Apparatus and methods for photomask backside cleaning |
Jason Rye |
2018-01-09 |
$16,545,000 |
