Issued Patents All Time
Showing 25 most recent of 114 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11982008 | Electroplating system | Paul R. McHugh, Gregory J. Wilson, John L. Klocke, Paul Van Valkenburg, Eric J. Bergman +5 more | 2024-05-14 |
| 11788200 | Fluid recovery in semiconductor processing | Sam Lee, Eric J. Bergman | 2023-10-17 |
| 11697887 | Multi-compartment electrochemical replenishment cell | Nolan L. Zimmerman, Charles Sharbono, Gregory J. Wilson, Paul R. McHugh, Paul Van Valkenburg +1 more | 2023-07-11 |
| 11686005 | Electroplating systems and methods with increased metal ion concentrations | Kwan Wook Roh, Charles Sharbono | 2023-06-27 |
| 11578422 | Electroplating system | Paul R. McHugh, Gregory J. Wilson, John L. Klocke, Paul Van Valkenburg, Eric J. Bergman +5 more | 2023-02-14 |
| 11551942 | Methods and apparatus for cleaning a substrate after processing | Manoj A. Gajendra, Mahadev Joshi, Arvind Thiyagarajan, Jon C. Farr | 2023-01-10 |
| 11550224 | Apparatus for post exposure bake | Gregory J. Wilson, Viachslav Babayan | 2023-01-10 |
| 11352711 | Fluid recovery in semiconductor processing | Sam Lee, Eric J. Bergman | 2022-06-07 |
| 11274377 | Seal apparatus for an electroplating system | Manjunatha Vishwanatha Adagoor, Karthikeyan Balaraman, Karthick Vasu, Shailesh Chouriya | 2022-03-15 |
| 11268208 | Electroplating system | Paul R. McHugh, Gregory J. Wilson, John L. Klocke, Paul Van Valkenburg, Eric J. Bergman +5 more | 2022-03-08 |
| 11262662 | Post exposure processing apparatus | Viachslav Babayan, Ludovic Godet, Robert B. Moore | 2022-03-01 |
| 11241718 | Cleaning components and methods in a plating system | Joseph Antony Jonathan, Jason Rye, James Emery Brown, Gregory J. Wilson, Eric J. Bergman +2 more | 2022-02-08 |
| 11214890 | Cleaning components and methods in a plating system | — | 2022-01-04 |
| 10845715 | Post exposure processing apparatus | Viachslav Babayan, Ludovic Godet, Robert B. Moore | 2020-11-24 |
| 10840104 | Controlled etch of nitride features | Eric J. Bergman, John L. Klocke, Charles Sharbono, Paul R. McHugh | 2020-11-17 |
| 10754252 | Apparatus for post exposure bake | Gregory J. Wilson, Viachslav Babayan | 2020-08-25 |
| 10401742 | Post exposure processing apparatus | Viachslav Babayan, Ludovic Godet, Robert B. Moore | 2019-09-03 |
| 10240248 | Adaptive electric field shielding in an electroplating processor using agitator geometry and motion control | Paul Van Valkenburg, Robert Mikkola, John L. Klocke, Paul R. McHugh, Gregory J. Wilson +1 more | 2019-03-26 |
| 10191379 | Removing photoresist from a wafer | Paul R. McHugh, John L. Klocke, Eric J. Bergman, Stuart Crane, Gregory J. Wilson | 2019-01-29 |
| 9984867 | Systems and methods for rinsing and drying substrates | Ekaterina A. Mikhaylichenko, Brian J. Brown, Vincent Steffan Francischetti | 2018-05-29 |
| 9964863 | Post exposure processing apparatus | Viachslav Babayan, Ludovic Godet, Robert B. Moore | 2018-05-08 |
| 9958782 | Apparatus for post exposure bake | Gregory J. Wilson, Viachslav Babayan | 2018-05-01 |
| 9937802 | Systems and methods for determining a duty cycle for a variable voltage converter | Daniel Richard Luedtke, Yulei Chen, Fazal Urrahman Syed, Wei Xu | 2018-04-10 |
| 9864283 | Apparatus and methods for photomask backside cleaning | Jason Rye | 2018-01-09 |
| 9859135 | Substrate rinsing systems and methods | Jonathan Frankel, Brian J. Brown, Vincent Steffan Francischetti, Paul R. McHugh, Ekaterina A. Mikhaylichenko | 2018-01-02 |