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| 12051599 |
Cleaning method with in-line SPM processing |
Brian J. Brown, Brian K. Kirkpatrick |
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| 12027382 |
Surface cleaning with directed high pressure chemistry |
Brian K. Kirkpatrick, Brian J. Brown |
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| 11942319 |
Pad carrier for horizontal pre-clean module |
Edward Golubovsky, Jagan Rangarajan |
2024-03-26 |
| 11819976 |
Spray system for slurry reduction during chemical mechanical polishing (cmp) |
Chih Chung Chou, Anand N. Iyer, Christopher Heung-Gyun Lee, Erik S. Rondum, Tiffany Yu-Nung Cheung +1 more |
2023-11-21 |
| 11764069 |
Asymmetry correction via variable relative velocity of a wafer |
Jimin Zhang, Brian J. Brown, Eric Lau, Jeonghoon Oh, Gerald Alonzo |
2023-09-19 |
| 11721563 |
Non-contact clean module |
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| 11682567 |
Cleaning system with in-line SPM processing |
Brian J. Brown, Brian K. Kirkpatrick |
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| 11289347 |
Non-contact clean module |
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| 10786885 |
Thin plastic polishing article for CMP applications |
Robert D. Tolles, Gregory E. Menk, Eric Davey, You Wang, Huyen Karen Tran +3 more |
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| 10751738 |
Spray bar design for uniform liquid flow distribution on a substrate |
Jagan Rangarajan, Gee Sun Hoey, Jaimie E. Stomberg |
2020-08-25 |
| 9984867 |
Systems and methods for rinsing and drying substrates |
Brian J. Brown, Kyle M. Hanson, Vincent Steffan Francischetti |
2018-05-29 |
| 9859135 |
Substrate rinsing systems and methods |
Jonathan Frankel, Brian J. Brown, Vincent Steffan Francischetti, Paul R. McHugh, Kyle M. Hanson |
2018-01-02 |
