Issued Patents All Time
Showing 25 most recent of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11772234 | Small batch polishing fluid delivery for CMP | Kirk Liebscher | 2023-10-03 |
| 11715193 | Color imaging for CMP monitoring | Dominic J. Benvegnu, Boguslaw A. Swedek, Abraham Ravid | 2023-08-01 |
| 10800000 | Multi-layered nano-fibrous CMP pads | Mahendra C. ORILALL, Fred C. Redeker, Rajeev Bajaj | 2020-10-13 |
| 10786885 | Thin plastic polishing article for CMP applications | Gregory E. Menk, Eric Davey, You Wang, Huyen Karen Tran, Fred C. Redeker +3 more | 2020-09-29 |
| 10565701 | Color imaging for CMP monitoring | Dominic J. Benvegnu, Boguslaw A. Swedek, Abraham Ravid | 2020-02-18 |
| 8545660 | Bonding apparatus and method | Steven M. Zuniga, Derek Aqui, Andrew J. Nagengast, Anthony Senn, Keenan Leon Guerrero | 2013-10-01 |
| 8151852 | Bonding apparatus and method | Steven M. Zuniga, Derek Aqui, Andrew J. Nagengast, Anthony Senn, Keenan Leon Guerrero | 2012-04-10 |
| 8079894 | Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion | Norman Shendon, Sasson Somekh, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee | 2011-12-20 |
| 7950407 | Apparatus for rapid filling of a processing volume | Victor Mimken | 2011-05-31 |
| 7754519 | Methods of forming a photovoltaic cell | Aditya Agarwal, Orion Leland | 2010-07-13 |
| 7677959 | Multilayer polishing pad and method of making | — | 2010-03-16 |
| 7614939 | Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion | Norman Shendon, Sasson Somekh, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee | 2009-11-10 |
| 7255632 | Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion | Norm Shendon, Sasson Somekh, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee | 2007-08-14 |
| 7238090 | Polishing apparatus having a trough | Norm Shendon, Sasson Somekh, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee | 2007-07-03 |
| 7189141 | Polishing pad with transparent window having reduced window leakage for a chemical mechanical polishing apparatus | — | 2007-03-13 |
| 7165565 | Megasonic wafer cleaning tank with reflector for improved wafer edge cleaning | David Alvarez, Jianshe Tang | 2007-01-23 |
| 7097544 | Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion | Norm Shendon, Sasson Somekh, Ilya Perlov, Eugene Gantvarg, Harry Q. Lee | 2006-08-29 |
| 6974371 | Two part retaining ring | Hung Chih Chen, Jeonghoon Oh, Steven M. Zuniga | 2005-12-13 |
| 6896585 | Polishing pad with transparent window having reduced window leakage for a chemical mechanical polishing apparatus | — | 2005-05-24 |
| 6716092 | Apparatus for making a polishing pad with a partial adhesive coating | — | 2004-04-06 |
| 6702651 | Method and apparatus for conditioning a polishing pad | — | 2004-03-09 |
| 6688957 | Substrate polishing article | — | 2004-02-10 |
| 6623341 | Substrate polishing apparatus | — | 2003-09-23 |
| 6607428 | Material for use in carrier and polishing pads | — | 2003-08-19 |
| 6592438 | CMP platen with patterned surface | Steven T. Mear, Gopalakrishna B. Prabhu, Sidney P. Huey, Fred C. Redeker | 2003-07-15 |