Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11772234 | Small batch polishing fluid delivery for CMP | Robert D. Tolles | 2023-10-03 |
| 8334191 | Two-chamber system and method for serial bonding and exfoliation of multiple workpieces | Steven M. Zuniga, Derek Aqui, Andrew J. Nagengast, John Alexander, Keenan Leon Guerrero | 2012-12-18 |
| 8173473 | Laser system for processing solar wafers in a carrier | Derek Aqui, Steven M. Zuniga, Venkateswaran Subbaraman, John Alexander, Zhenhua Zhang +1 more | 2012-05-08 |