Issued Patents All Time
Showing 25 most recent of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12330262 | Dual membrane carrier head for chemical mechanical polishing | Steven M. Zuniga, Jay Gurusamy | 2025-06-17 |
| 12251788 | Polishing head with local wafer pressure | Steven M. Zuniga, Jay Gurusamy, Charles C. Garretson, Vladimir Galburt | 2025-03-18 |
| 12214469 | Polishing head retaining ring tilting moment control | Steven M. Zuniga, Jay Gurusamy | 2025-02-04 |
| 12048981 | Retaining ring having inner surfaces with features | Steven Mark Reedy, Simon Yavelberg, Jeonghoon Oh, Steven M. Zuniga, Samuel Chu-Chiang Hsu +1 more | 2024-07-30 |
| 12030156 | Polishing carrier head with piezoelectric pressure control | Brian J. Brown, Justin Ho Kuen Wong | 2024-07-09 |
| 12033865 | Retaining ring having inner surfaces with facets | Jeonghoon Oh, Steven M. Zuniga, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2024-07-09 |
| 11986923 | Polishing head with local wafer pressure | Steven M. Zuniga, Jay Gurusamy, Charles C. Garretson, Vladimir Galburt | 2024-05-21 |
| 11945073 | Dual membrane carrier head for chemical mechanical polishing | Steven M. Zuniga, Jay Gurusamy | 2024-04-02 |
| 11931857 | Deformable substrate chuck | Steven M. Zuniga, Jay Gurusamy | 2024-03-19 |
| 11904429 | Substrate polishing apparatus with contact extension or adjustable stop | Steven M. Zuniga, Jay Gurusamy | 2024-02-20 |
| 11890715 | Polishing carrier head with piezoelectric pressure control | Brian J. Brown, Justin Ho Kuen Wong | 2024-02-06 |
| 11780049 | Polishing carrier head with multiple angular pressurizable zones | Steven M. Zuniga, Jay Gurusamy, Vladimir Galburt | 2023-10-10 |
| 11724357 | Pivotable substrate retaining ring | Steven M. Zuniga, Jay Gurusamy | 2023-08-15 |
| 11682561 | Retaining ring having inner surfaces with facets | Jeonghoon Oh, Steven M. Zuniga, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2023-06-20 |
| 11673226 | Retaining ring for CMP | Christopher Heung-Gyun Lee, Thomas Li, Anand N. Iyer, Jie Diao, Huanbo Zhang +3 more | 2023-06-13 |
| 11660721 | Dual loading retaining ring | Steven M. Zuniga | 2023-05-30 |
| 11623321 | Polishing head retaining ring tilting moment control | Steven M. Zuniga, Jay Gurusamy | 2023-04-11 |
| 11511390 | Pivotable substrate retaining ring | Steven M. Zuniga, Jay Gurusamy | 2022-11-29 |
| 11453099 | Retaining ring having inner surfaces with features | Steven Mark Reedy, Simon Yavelberg, Jeonghoon Oh, Steven M. Zuniga, Samuel Chu-Chiang Hsu +1 more | 2022-09-27 |
| 11400560 | Retaining ring design | Jeonghoon Oh, Charles C. Garretson, Eric Lau, Steven M. Zuniga, Edwin C. Suarez +2 more | 2022-08-02 |
| 11344991 | Retainer for chemical mechanical polishing carrier head | Steven M. Zuniga | 2022-05-31 |
| 11056350 | Retaining ring having inner surfaces with facets | Jeonghoon Oh, Steven M. Zuniga, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2021-07-06 |
| 10702971 | Textured membrane for a multi-chamber carrier head | Jeonghoon Oh, Tsz-Sin Siu, Hung Chih Chen, Steven M. Zuniga, Thomas Brezoczky | 2020-07-07 |
| 10500695 | Retaining ring having inner surfaces with features | Steven Mark Reedy, Simon Yavelberg, Jeonghoon Oh, Steven M. Zuniga, Samuel Chu-Chiang Hsu +1 more | 2019-12-10 |
| 10322492 | Retaining ring for CMP | Christopher Heung-Gyun Lee, Thomas Li, Anand N. Iyer, Jie Diao, Huanbo Zhang +3 more | 2019-06-18 |