Issued Patents All Time
Showing 25 most recent of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400892 | High throughput polishing modules and modular polishing systems | Jagan Rangarajan, Edward Golubovsky, Steven M. Zuniga | 2025-08-26 |
| 12394651 | High throughput polishing modules and modular polishing systems | Jagan Rangarajan, Edward Golubovsky, Steven M. Zuniga | 2025-08-19 |
| 12365060 | Chemical mechanical polishing correction tool | Steven M. Zuniga | 2025-07-22 |
| 12337439 | Multiple disk pad conditioner | Steven M. Zuniga, Takashi Fujikawa, Jeonghoon Oh | 2025-06-24 |
| 12330262 | Dual membrane carrier head for chemical mechanical polishing | Steven M. Zuniga, Andrew J. Nagengast | 2025-06-17 |
| 12251788 | Polishing head with local wafer pressure | Andrew J. Nagengast, Steven M. Zuniga, Charles C. Garretson, Vladimir Galburt | 2025-03-18 |
| 12251787 | Modular chemical mechanical polisher with simultaneous polishing and pad treatment | Steven M. Zuniga | 2025-03-18 |
| 12214469 | Polishing head retaining ring tilting moment control | Andrew J. Nagengast, Steven M. Zuniga | 2025-02-04 |
| 12194591 | Roller for location-specific wafer polishing | Ekaterina A. Mikhaylichenko, Fred C. Redeker, Brian J. Brown, Chirantha Rodrigo, Steven M. Zuniga | 2025-01-14 |
| 12128524 | Membrane for carrier head with segmented substrate chuck | Steven M. Zuniga | 2024-10-29 |
| 12076877 | Polishing platens and polishing platen manufacturing methods | Bum Jick Kim, Danielle Loi, Steven M. Zuniga | 2024-09-03 |
| 12042899 | Polishing head with membrane position control | Steven M. Zuniga | 2024-07-23 |
| 11986923 | Polishing head with local wafer pressure | Andrew J. Nagengast, Steven M. Zuniga, Charles C. Garretson, Vladimir Galburt | 2024-05-21 |
| 11945073 | Dual membrane carrier head for chemical mechanical polishing | Steven M. Zuniga, Andrew J. Nagengast | 2024-04-02 |
| 11931857 | Deformable substrate chuck | Steven M. Zuniga, Andrew J. Nagengast | 2024-03-19 |
| 11919120 | Polishing system with contactless platen edge control | David J. Lischka, Danielle Loi, Steven M. Zuniga | 2024-03-05 |
| 11904429 | Substrate polishing apparatus with contact extension or adjustable stop | Steven M. Zuniga, Andrew J. Nagengast | 2024-02-20 |
| 11890717 | Polishing system with platen for substrate edge control | Steven M. Zuniga, Jeonghoon Oh | 2024-02-06 |
| 11780049 | Polishing carrier head with multiple angular pressurizable zones | Steven M. Zuniga, Andrew J. Nagengast, Vladimir Galburt | 2023-10-10 |
| 11759911 | Carrier head with segmented substrate chuck | Steven M. Zuniga | 2023-09-19 |
| 11745227 | Substrate cleaning devices and methods thereof | Steven M. Zuniga, Jagan Rangarajan | 2023-09-05 |
| 11724357 | Pivotable substrate retaining ring | Steven M. Zuniga, Andrew J. Nagengast | 2023-08-15 |
| 11717936 | Methods for a web-based CMP system | Dmitry Sklyar, Jeonghoon Oh, Gerald Alonzo, Jonathan P. Domin, Steven M. Zuniga | 2023-08-08 |
| 11623320 | Polishing head with membrane position control | Steven M. Zungia | 2023-04-11 |
| 11623321 | Polishing head retaining ring tilting moment control | Andrew J. Nagengast, Steven M. Zuniga | 2023-04-11 |