| 12400892 |
High throughput polishing modules and modular polishing systems |
Jagan Rangarajan, Edward Golubovsky, Steven M. Zuniga |
2025-08-26 |
|
| 12394651 |
High throughput polishing modules and modular polishing systems |
Jagan Rangarajan, Edward Golubovsky, Steven M. Zuniga |
2025-08-19 |
|
| 12365060 |
Chemical mechanical polishing correction tool |
Steven M. Zuniga |
2025-07-22 |
|
| 12337439 |
Multiple disk pad conditioner |
Steven M. Zuniga, Takashi Fujikawa, Jeonghoon Oh |
2025-06-24 |
|
| 12330262 |
Dual membrane carrier head for chemical mechanical polishing |
Steven M. Zuniga, Andrew J. Nagengast |
2025-06-17 |
|
| 12251787 |
Modular chemical mechanical polisher with simultaneous polishing and pad treatment |
Steven M. Zuniga |
2025-03-18 |
|
| 12251788 |
Polishing head with local wafer pressure |
Andrew J. Nagengast, Steven M. Zuniga, Charles C. Garretson, Vladimir Galburt |
2025-03-18 |
|
| 12214469 |
Polishing head retaining ring tilting moment control |
Andrew J. Nagengast, Steven M. Zuniga |
2025-02-04 |
|
| 12194591 |
Roller for location-specific wafer polishing |
Ekaterina A. Mikhaylichenko, Fred C. Redeker, Brian J. Brown, Chirantha Rodrigo, Steven M. Zuniga |
2025-01-14 |
|
| 12128524 |
Membrane for carrier head with segmented substrate chuck |
Steven M. Zuniga |
2024-10-29 |
$69,228,000 |
| 12076877 |
Polishing platens and polishing platen manufacturing methods |
Bum Jick Kim, Danielle Loi, Steven M. Zuniga |
2024-09-03 |
$44,731,000 |
| 12042899 |
Polishing head with membrane position control |
Steven M. Zuniga |
2024-07-23 |
$84,339,000 |
| 11986923 |
Polishing head with local wafer pressure |
Andrew J. Nagengast, Steven M. Zuniga, Charles C. Garretson, Vladimir Galburt |
2024-05-21 |
$57,593,000 |
| 11945073 |
Dual membrane carrier head for chemical mechanical polishing |
Steven M. Zuniga, Andrew J. Nagengast |
2024-04-02 |
$42,223,000 |
| 11931857 |
Deformable substrate chuck |
Steven M. Zuniga, Andrew J. Nagengast |
2024-03-19 |
$54,086,000 |
| 11919120 |
Polishing system with contactless platen edge control |
David J. Lischka, Danielle Loi, Steven M. Zuniga |
2024-03-05 |
$73,319,000 |
| 11904429 |
Substrate polishing apparatus with contact extension or adjustable stop |
Steven M. Zuniga, Andrew J. Nagengast |
2024-02-20 |
$66,055,000 |
| 11890717 |
Polishing system with platen for substrate edge control |
Steven M. Zuniga, Jeonghoon Oh |
2024-02-06 |
$39,056,000 |
| 11780049 |
Polishing carrier head with multiple angular pressurizable zones |
Steven M. Zuniga, Andrew J. Nagengast, Vladimir Galburt |
2023-10-10 |
$39,034,000 |
| 11759911 |
Carrier head with segmented substrate chuck |
Steven M. Zuniga |
2023-09-19 |
$44,467,000 |
| 11745227 |
Substrate cleaning devices and methods thereof |
Steven M. Zuniga, Jagan Rangarajan |
2023-09-05 |
$42,922,000 |
| 11724357 |
Pivotable substrate retaining ring |
Steven M. Zuniga, Andrew J. Nagengast |
2023-08-15 |
$42,730,000 |
| 11717936 |
Methods for a web-based CMP system |
Dmitry Sklyar, Jeonghoon Oh, Gerald Alonzo, Jonathan P. Domin, Steven M. Zuniga |
2023-08-08 |
$46,911,000 |
| 11623320 |
Polishing head with membrane position control |
Steven M. Zungia |
2023-04-11 |
$32,726,000 |
| 11623321 |
Polishing head retaining ring tilting moment control |
Andrew J. Nagengast, Steven M. Zuniga |
2023-04-11 |
$32,726,000 |
