| 12400892 |
High throughput polishing modules and modular polishing systems |
Jagan Rangarajan, Jay Gurusamy, Steven M. Zuniga |
2025-08-26 |
| 12394651 |
High throughput polishing modules and modular polishing systems |
Jagan Rangarajan, Jay Gurusamy, Steven M. Zuniga |
2025-08-19 |
| 12142513 |
Wafer processing tools and methods thereof |
Jagan Rangarajan, Shaun Van Der Veen, Justin Ho Kuen Wong, Steven M. Zuniga |
2024-11-12 |
| 11942319 |
Pad carrier for horizontal pre-clean module |
Jagan Rangarajan, Ekaterina A. Mikhaylichenko |
2024-03-26 |
| 11749552 |
Wafer processing tools and methods thereof |
Jagan Rangarajan, Shaun Van Der Veen, Justin Ho Kuen Wong, Steven M. Zuniga |
2023-09-05 |
| 11721563 |
Non-contact clean module |
Jagan Rangarajan, Adrian Blank, Balasubramaniam Coimbatore Jaganathan, Steven M. Zuniga, Ekaterina A. Mikhaylichenko +2 more |
2023-08-08 |
| D947802 |
Replaceable substrate carrier interfacing film |
Clinton SAKATA |
2022-04-05 |
| 11289347 |
Non-contact clean module |
Jagan Rangarajan, Adrian Blank, Balasubramaniam Coimbatore Jaganathan, Steven M. Zuniga, Ekaterina A. Mikhaylichenko +2 more |
2022-03-29 |
| 7713390 |
Ground shield for a PVD chamber |
— |
2010-05-11 |
