Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400892 | High throughput polishing modules and modular polishing systems | Jagan Rangarajan, Jay Gurusamy, Steven M. Zuniga | 2025-08-26 |
| 12394651 | High throughput polishing modules and modular polishing systems | Jagan Rangarajan, Jay Gurusamy, Steven M. Zuniga | 2025-08-19 |
| 12142513 | Wafer processing tools and methods thereof | Jagan Rangarajan, Shaun Van Der Veen, Justin Ho Kuen Wong, Steven M. Zuniga | 2024-11-12 |
| 11942319 | Pad carrier for horizontal pre-clean module | Jagan Rangarajan, Ekaterina A. Mikhaylichenko | 2024-03-26 |
| 11749552 | Wafer processing tools and methods thereof | Jagan Rangarajan, Shaun Van Der Veen, Justin Ho Kuen Wong, Steven M. Zuniga | 2023-09-05 |
| 11721563 | Non-contact clean module | Jagan Rangarajan, Adrian Blank, Balasubramaniam Coimbatore Jaganathan, Steven M. Zuniga, Ekaterina A. Mikhaylichenko +2 more | 2023-08-08 |
| D947802 | Replaceable substrate carrier interfacing film | Clinton SAKATA | 2022-04-05 |
| 11289347 | Non-contact clean module | Jagan Rangarajan, Adrian Blank, Balasubramaniam Coimbatore Jaganathan, Steven M. Zuniga, Ekaterina A. Mikhaylichenko +2 more | 2022-03-29 |
| 7713390 | Ground shield for a PVD chamber | — | 2010-05-11 |