Patents per Year
Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11721563 | Non-contact clean module | Jagan Rangarajan, Edward Golubovsky, Balasubramaniam Coimbatore Jaganathan, Steven M. Zuniga, Ekaterina A. Mikhaylichenko +2 more | 2023-08-08 | $46,911,000 |
| 11289347 | Non-contact clean module | Jagan Rangarajan, Edward Golubovsky, Balasubramaniam Coimbatore Jaganathan, Steven M. Zuniga, Ekaterina A. Mikhaylichenko +2 more | 2022-03-29 | $46,373,000 |
| 9646859 | Disk-brush cleaner module with fluid jet | Hui Chen, Allen L. D'Ambra, Sen-Hou Ko, Yufei Chen, Mario David Silvetti +2 more | 2017-05-09 | $25,128,000 |