Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11923172 | Paired dynamic parallel plate capacitively coupled plasmas | Hari Ponnekanti, Tsutomu Tanaka, Mandyam Sriram, Dmitry A. Dzilno, Sanjeev Baluja | 2024-03-05 |
| 11692267 | Plasma induced modification of silicon carbide surface | Francis Kanyiri Mungai, Vijayabhaskara Venkatagiriyappa, Yung-Cheng Hsu, Keiichi Tanaka, Mihaela Balseanu | 2023-07-04 |
| 11584992 | Gas distribution assembly for improved pump-purge and precursor delivery | Kenneth Brian Doering, Kevin Griffin | 2023-02-21 |
| 11581213 | Susceptor wafer chucks for bowed wafers | Abhishek Chowdhury, Vijayabhaskara Venkatagiriyappa, Mihaela Balseanu, Jyoti Prakash Deo, Srinivas Ramakrishna +4 more | 2023-02-14 |
| 11396703 | Apparatus and methods for improving chemical utilization rate in deposition process | Kevin Griffin, Sanjeev Baluja, Joseph AuBuchon, Hari Ponnekanti | 2022-07-26 |
| 11282676 | Paired dynamic parallel plate capacitively coupled plasmas | Hari Ponnekanti, Tsutomu Tanaka, Mandyam Sriram, Dmitry A. Dzilno, Sanjeev Baluja | 2022-03-22 |
| 11173579 | Inner retaining ring and outer retaining ring for carrier head | Hung Chih Chen, Yin Yuan, Samuel Chu-Chiang Hsu, Huanbo Zhang, Gautam Shashank Dandavate | 2021-11-16 |
| 11174553 | Gas distribution assembly for improved pump-purge and precursor delivery | Kenneth Brian Doering, Kevin Griffin | 2021-11-16 |
| 11081318 | Geometrically selective deposition of dielectric films utilizing low frequency bias | Kenichi Ohno, Keiichi Tanaka, Li-Qun Xia, Tsutomu Tanaka, Dmitry A. Dzilno +4 more | 2021-08-03 |
| 9812344 | Wafer processing system with chuck assembly maintenance module | Jason Rye, Randy Harris, Bryan Puch, Vincent Steffan Francischetti, Satish Sundar | 2017-11-07 |
| 9646859 | Disk-brush cleaner module with fluid jet | Hui Chen, Allen L. D'Ambra, Sen-Hou Ko, Yufei Chen, Adrian Blank +2 more | 2017-05-09 |
| 7997851 | Apparatus and method for a multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same | Robert B. Moore, Eric Ruhland, Satish Sundar | 2011-08-16 |
| 7695232 | Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same | Robert B. Moore, Eric Ruhland, Satish Sundar | 2010-04-13 |
| 7582167 | Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support | Andrzej Kaszuba, Sophia M. Velastegui, Visweswaren Sivaramakrishnan, Pyongwon Yim, Tom K. Cho +2 more | 2009-09-01 |
| 7374393 | Method of retaining a substrate during a substrate transferring process | Mike Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2008-05-20 |
| 7374391 | Substrate gripper for a substrate handling robot | Michael R. Rice, Jeffrey C. Hudgens, Charles T. Carlson, William T. Weaver, Robert B. Lowrance +6 more | 2008-05-20 |
| 7279049 | Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support | Andrzej Kaszuba, Sophia M. Velastegui, Visweswaren Sivaramakrishnan, Pyongwon Yim, Tom K. Cho +2 more | 2007-10-09 |
| 7107125 | Method and apparatus for monitoring the position of a semiconductor processing robot | Pyongwon Yim, Satish Sundar, Vinay Shah, Douglas Kitajima, Venkatesh Babu +3 more | 2006-09-12 |
| 7094313 | Universal mid-frequency matching network | Eller Y. Juco, Visweswaren Sivaramakrishnan, Talex Sajoto | 2006-08-22 |
| 7024105 | Substrate heater assembly | Mark Fodor, Sophia M. Velastegui, Soovo Sen, Visweswaren Sivaramakrishnan, Peter Wai-Man Lee | 2006-04-04 |
| 6911403 | Methods of reducing plasma-induced damage for advanced plasma CVD dielectrics | Lihua Li, Tsutomu Tanaka, Tzu-Fang Huang, Li-Qun Xia, Dian Sugiarto +2 more | 2005-06-28 |