Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9218997 | Electrostatic chuck having reduced arcing | Seok Yul Jun, Bum Jin Park, Sun-il Kim, Hyong Seok Oh, Sung-Chul Cho +5 more | 2015-12-22 |
| 7094313 | Universal mid-frequency matching network | Eller Y. Juco, Visweswaren Sivaramakrishnan, Mario David Silvetti | 2006-08-22 |
| 6616767 | High temperature ceramic heater assembly with RF capability | Jun Zhao, Charles Dornfest, Harold Mortensen, Richard Palicka | 2003-09-09 |
| 6527865 | Temperature controlled gas feedthrough | Charles Dornfest, Leonid Selyutin, Jun Zhao, Vincent Ku, Xiao Liang Jin | 2003-03-04 |
| 6464795 | Substrate support member for a processing chamber | Semyon Sherstinsky, Calvin Augason, Leonel A. Zuniga, Jun Zhao, Leonid Selyutin +5 more | 2002-10-15 |
| 6270859 | Plasma treatment of titanium nitride formed by chemical vapor deposition | Jun Zhao, Ashok Sinha, Avi Tepman, Mei Chang, Lee Luo +4 more | 2001-08-07 |
| 6258170 | Vaporization and deposition apparatus | Sasson Somekh, Jun Zhao, Charles Dornfest, Leonid Selyutin, Vincent Ku +3 more | 2001-07-10 |
| 6189482 | High temperature, high flow rate chemical vapor deposition apparatus and related methods | Jun Zhao, Lee Luo, Xiao Liang Jin, Jia-Xiang Wang, Stefan Wolff +2 more | 2001-02-20 |
| 6179924 | Heater for use in substrate processing apparatus to deposit tungsten | Jun Zhao, Leonid Selyutin | 2001-01-30 |
| 6165271 | Temperature controlled process and chamber lid | Jun Zhao, Sasson Somekh, Charles Dornfest, Leonid Selyutin | 2000-12-26 |
| 6129044 | Apparatus for substrate processing with improved throughput and yield | Jun Zhao, Ashok Sinha, Avi Tepman, Mei Chang, Lee Luo +4 more | 2000-10-10 |
| 6123773 | Gas manifold | Leonid Selyutin, Charles Dornfest, Jun Zhao | 2000-09-26 |
| 6120609 | Self-aligning lift mechanism | Leonid Selyutin, Jun Zhao | 2000-09-19 |
| 6099651 | Temperature controlled chamber liner | Jun Zhao, Charles Dornfest, Leonid Selyutin | 2000-08-08 |
| 6082714 | Vaporization apparatus and process | Charles Dornfest, Jun Zhao, Vincent Ku, Po Tang, Frank Chang | 2000-07-04 |
| 6077562 | Method for depositing barium strontium titanate | Charles Dornfest, Jun Zhao, Lee Luo | 2000-06-20 |
| 6066209 | Cold trap | Jun Zhao, Vincent Ku, Charles Dornfest | 2000-05-23 |
| 6063199 | Temperature controlled liner | Leonid Selyutin, Vincent Ku, Jun Zhao, Charles Dornfest | 2000-05-16 |
| 6056823 | Temperature controlled gas feedthrough | Leonid Selyutin, Jun Zhao, Charles Dornfest | 2000-05-02 |
| 6051286 | High temperature, high deposition rate process and apparatus for depositing titanium layers | Jun Zhao, Lee Luo, Xiao Liang Jin, Jia-Xiang Wang, Stefan Wolff | 2000-04-18 |
| 6035101 | High temperature multi-layered alloy heater assembly and related methods | Leonid Selyutin, Jun Zhao, Stefan Wolff | 2000-03-07 |
| 5994678 | Apparatus for ceramic pedestal and metal shaft assembly | Jun Zhao, Leonid Selyutin, Charles Dornfest, Stefan Wolff, Lee Luo +1 more | 1999-11-30 |
| 5983906 | Methods and apparatus for a cleaning process in a high temperature, corrosive, plasma environment | Jun Zhao, Lee Luo, Jia-Xiang Wang, Xiao Liang Jin, Stefan Wolff +2 more | 1999-11-16 |
| 5968379 | High temperature ceramic heater assembly with RF capability and related methods | Jun Zhao, Charles Dornfest, Leonid Selyutin, Stefan Wolff, Lee Luo +2 more | 1999-10-19 |
| 5964947 | Removable pumping channel liners within a chemical vapor deposition chamber | Jun Zhao, Ashok Sinha, Avi Tepman, Mei Chang, Lee Luo +4 more | 1999-10-12 |