Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6189482 | High temperature, high flow rate chemical vapor deposition apparatus and related methods | Jun Zhao, Lee Luo, Xiao Liang Jin, Talex Sajoto, Stefan Wolff +2 more | 2001-02-20 |
| 6051286 | High temperature, high deposition rate process and apparatus for depositing titanium layers | Jun Zhao, Lee Luo, Xiao Liang Jin, Stefan Wolff, Talex Sajoto | 2000-04-18 |
| 5983906 | Methods and apparatus for a cleaning process in a high temperature, corrosive, plasma environment | Jun Zhao, Lee Luo, Xiao Liang Jin, Stefan Wolff, Talex Sajoto +2 more | 1999-11-16 |