LL

Lee Luo

Applied Materials: 28 patents #406 of 7,310Top 6%
AE Advanced Micro-Fabrication Equipment: 1 patents #26 of 61Top 45%
SI Siliconix Incorporated: 1 patents #74 of 125Top 60%
Overall (All Time): #114,096 of 4,157,543Top 3%
32
Patents All Time

Issued Patents All Time

Showing 25 most recent of 32 patents

Patent #TitleCo-InventorsDate
8336488 Multi-station plasma reactor with multiple plasma regions Aihua Chen, Yijun Liu, Jinyuan Chen, Tuqiang Ni, Gerald Yin +1 more 2012-12-25
7745329 Tungsten nitride atomic layer deposition processes Shulin Wang, Ulrich Kroemer, Aihua Chen, Ming Li 2010-06-29
7608300 Methods and devices to reduce defects in dielectric stack structures Christopher Dennis Bencher 2009-10-27
7429516 Tungsten nitride atomic layer deposition processes Shulin Wang, Ulrich Kroemer, Aihua Chen, Ming Li 2008-09-30
7335266 Method of forming a controlled and uniform lightly phosphorous doped silicon film Li Fu, Sheeba J. Panayil, Shulin Wang, Christopher Quentin, Aihua Chen +1 more 2008-02-26
7115499 Cyclical deposition of tungsten nitride for metal oxide gate electrode Shulin Wang, Ulrich Kroemer, Aihua Chen, Ming Li 2006-10-03
6982214 Method of forming a controlled and uniform lightly phosphorous doped silicon film Li Fu, Sheeba J. Panayil, Shulin Wang, Christopher Quentin, Aihua Chen +1 more 2006-01-03
6949203 System level in-situ integrated dielectric etch process particularly useful for copper dual damascene Chang-Lin Hsieh, Diana Xiaobing Ma, Brian Sy-Yuan Shieh, Gerald Yin, Jennifer Y. Sun +2 more 2005-09-27
6884464 Methods for forming silicon comprising films using hexachlorodisilane in a single-wafer deposion chamber R. Suryanarayanan Iyer, Janardhanan Anand Subramony, Errol Antonio C. Sanchez, Xiaoliang Jin, Aihua Chen +4 more 2005-04-26
6833161 Cyclical deposition of tungsten nitride for metal oxide gate electrode Shulin Wang, Ulrich Kroemer, Aihua Chen, Ming Li 2004-12-21
6802906 Emissivity-change-free pumping plate kit in a single wafer chamber Xiaoliang Jin, Shulin Wang, Henry Ho, Steven Chen 2004-10-12
6793835 System level in-situ integrated dielectric etch process particularly useful for copper dual damascene Claes Bjorkman, Brian Sy-Yuan Shieh, Gerald Yin 2004-09-21
6726955 Method of controlling the crystal structure of polycrystalline silicon Shulin Wang, Steven Chen, Errol Antonio C. Sanchez 2004-04-27
6713127 Methods for silicon oxide and oxynitride deposition using single wafer low pressure CVD Janardhanan Anand Subramony, Yoshitaka Yokota, Ramaseshan Iyer, Aihua Chen 2004-03-30
6582522 Emissivity-change-free pumping plate kit in a single wafer chamber Henry Ho, Shulin Wang, Binh Tran, Alexander Tam, Errol Antonio C. Sanchez +2 more 2003-06-24
6566183 Method of making a transistor, in particular spacers of the transistor Steven Chen, Kegang Huang, Tzy-Tzan Fu, Kuan-Ting Lin, Hung-Chuan Chen 2003-05-20
6559074 Method of forming a silicon nitride layer on a substrate Steven Chen, Xianzhi Tao, Shulin Wang, Kegang Huang, Sang-Hoon Ahn 2003-05-06
6559039 Doped silicon deposition process in resistively heated single wafer chamber Shulin Wang, Steven Chen, Errol Antonio C. Sanchez, Xianzhi Tao, Zoran Dragojlovic +1 more 2003-05-06
6500357 System level in-situ integrated dielectric etch process particularly useful for copper dual damascene Claes Bjorkman, Brian Sy-Yuan Shieh, Gerald Yin 2002-12-31
6392290 Vertical structure for semiconductor wafer-level chip scale packages Y. Mohammed Kasem, Yueh-Se Ho, Chang-Sheng Chen, Eddy Tjhia, Bosco Lan +2 more 2002-05-21
6270859 Plasma treatment of titanium nitride formed by chemical vapor deposition Jun Zhao, Ashok Sinha, Avi Tepman, Mei Chang, Alex Schreiber +4 more 2001-08-07
6210485 Chemical vapor deposition vaporizer Jun Zhao, Xiaoliang Jin, Frank Chang, Charles Dornfest, Po Tang 2001-04-03
6189482 High temperature, high flow rate chemical vapor deposition apparatus and related methods Jun Zhao, Xiao Liang Jin, Jia-Xiang Wang, Talex Sajoto, Stefan Wolff +2 more 2001-02-20
6129044 Apparatus for substrate processing with improved throughput and yield Jun Zhao, Ashok Sinha, Avi Tepman, Mei Chang, Alex Schreiber +4 more 2000-10-10
6077562 Method for depositing barium strontium titanate Charles Dornfest, Jun Zhao, Talex Sajoto 2000-06-20