Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6051286 | High temperature, high deposition rate process and apparatus for depositing titanium layers | Jun Zhao, Xiao Liang Jin, Jia-Xiang Wang, Stefan Wolff, Talex Sajoto | 2000-04-18 |
| 5994678 | Apparatus for ceramic pedestal and metal shaft assembly | Jun Zhao, Talex Sajoto, Leonid Selyutin, Charles Dornfest, Stefan Wolff +1 more | 1999-11-30 |
| 5993916 | Method for substrate processing with improved throughput and yield | Jun Zhao, Xiao Liang Jin | 1999-11-30 |
| 5983906 | Methods and apparatus for a cleaning process in a high temperature, corrosive, plasma environment | Jun Zhao, Jia-Xiang Wang, Xiao Liang Jin, Stefan Wolff, Talex Sajoto +2 more | 1999-11-16 |
| 5968379 | High temperature ceramic heater assembly with RF capability and related methods | Jun Zhao, Charles Dornfest, Talex Sajoto, Leonid Selyutin, Stefan Wolff +2 more | 1999-10-19 |
| 5964947 | Removable pumping channel liners within a chemical vapor deposition chamber | Jun Zhao, Ashok Sinha, Avi Tepman, Mei Chang, Alex Schreiber +4 more | 1999-10-12 |
| 5846332 | Thermally floating pedestal collar in a chemical vapor deposition chamber | Jun Zhao, Ashok Sinha, Avi Tepman, Mei Chang, Alex Schreiber +4 more | 1998-12-08 |