| 6527865 |
Temperature controlled gas feedthrough |
Talex Sajoto, Charles Dornfest, Jun Zhao, Vincent Ku, Xiao Liang Jin |
2003-03-04 |
| 6464795 |
Substrate support member for a processing chamber |
Semyon Sherstinsky, Calvin Augason, Leonel A. Zuniga, Jun Zhao, Talex Sajoto +5 more |
2002-10-15 |
| 6258170 |
Vaporization and deposition apparatus |
Sasson Somekh, Jun Zhao, Charles Dornfest, Talex Sajoto, Vincent Ku +3 more |
2001-07-10 |
| 6189482 |
High temperature, high flow rate chemical vapor deposition apparatus and related methods |
Jun Zhao, Lee Luo, Xiao Liang Jin, Jia-Xiang Wang, Talex Sajoto +2 more |
2001-02-20 |
| 6179924 |
Heater for use in substrate processing apparatus to deposit tungsten |
Jun Zhao, Talex Sajoto |
2001-01-30 |
| 6165271 |
Temperature controlled process and chamber lid |
Jun Zhao, Sasson Somekh, Talex Sajoto, Charles Dornfest |
2000-12-26 |
| 6123773 |
Gas manifold |
Talex Sajoto, Charles Dornfest, Jun Zhao |
2000-09-26 |
| 6120609 |
Self-aligning lift mechanism |
Talex Sajoto, Jun Zhao |
2000-09-19 |
| 6099651 |
Temperature controlled chamber liner |
Talex Sajoto, Jun Zhao, Charles Dornfest |
2000-08-08 |
| 6063199 |
Temperature controlled liner |
Talex Sajoto, Vincent Ku, Jun Zhao, Charles Dornfest |
2000-05-16 |
| 6056823 |
Temperature controlled gas feedthrough |
Talex Sajoto, Jun Zhao, Charles Dornfest |
2000-05-02 |
| 6035101 |
High temperature multi-layered alloy heater assembly and related methods |
Talex Sajoto, Jun Zhao, Stefan Wolff |
2000-03-07 |
| 5994678 |
Apparatus for ceramic pedestal and metal shaft assembly |
Jun Zhao, Talex Sajoto, Charles Dornfest, Stefan Wolff, Lee Luo +1 more |
1999-11-30 |
| 5968379 |
High temperature ceramic heater assembly with RF capability and related methods |
Jun Zhao, Charles Dornfest, Talex Sajoto, Stefan Wolff, Lee Luo +2 more |
1999-10-19 |
| 5951776 |
Self aligning lift mechanism |
Jun Zhao |
1999-09-14 |
