Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9917001 | High temperature fine grain aluminum heater | Abhi Desai, Robert T. Hirahara | 2018-03-13 |
| 9022715 | Load lock chamber designs for high-throughput processing system | Alexander S. Polyak, James L'HEUREUX, Christopher T. Lane, Susanne Schlaefer, Juergen Henrich +1 more | 2015-05-05 |
| 6464790 | Substrate support member | Semyon Sherstinsky, Arnold Kholodenko, Samuel Wilson, Michael Stanley Phillips, Leonel A. Zuniga | 2002-10-15 |
| 6464795 | Substrate support member for a processing chamber | Semyon Sherstinsky, Leonel A. Zuniga, Jun Zhao, Talex Sajoto, Leonid Selyutin +5 more | 2002-10-15 |
| 6271148 | Method for improved remote microwave plasma source for use with substrate processing system | Chien-Teh Kao, Kenneth Tsai, Quyen Pham, Ronald L. Rose, Joseph Yudovsky | 2001-08-07 |
| 6026762 | Apparatus for improved remote microwave plasma source for use with substrate processing systems | Chien-Teh Kao, Kenneth Tsai, Quyen Pham, Ronald L. Rose, Joseph Yudovsky | 2000-02-22 |