Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464790 | Substrate support member | Semyon Sherstinsky, Arnold Kholodenko, Calvin Augason, Michael Stanley Phillips, Leonel A. Zuniga | 2002-10-15 |
| 6319728 | Method for treating a deposited film for resistivity reduction | Mohan K. Bhan, Ling Chen, Bo Zheng, Justin Jones, Seshadri Ganguli +2 more | 2001-11-20 |
| 6110530 | CVD method of depositing copper films by using improved organocopper precursor blend | Ling Chen, Seshadri Ganguli, Bo Zheng, Christophe Marcadal | 2000-08-29 |
| 5740009 | Apparatus for improving wafer and chuck edge protection | Bryan Pu, Hongching Shan, Kuang-Han Ke, Michael Welch, Semyon Sherstinsky +4 more | 1998-04-14 |