Issued Patents All Time
Showing 25 most recent of 89 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10574882 | Image capturing apparatus, storage space adjusting method thereof and non-transitory computer-readable recording medium | — | 2020-02-25 |
| 10384707 | Robot swing structure | — | 2019-08-20 |
| 8668776 | Gas delivery apparatus and method for atomic layer deposition | Vincent Ku, Dien-Yeh Wu, Hua Chung, Alan Ouye, Norman Nakashima | 2014-03-11 |
| 8318266 | Enhanced copper growth with ultrathin barrier layer for high performance interconnects | Hua Chung, Barry Chin, Hong Mei Zhang | 2012-11-27 |
| 8293328 | Enhanced copper growth with ultrathin barrier layer for high performance interconnects | Hua Chung, Barry Chin, Hong Mei Zhang | 2012-10-23 |
| 8070879 | Apparatus and method for hybrid chemical processing | Vincent Ku, Mei Chang, Dien-Yeh Wu, Hua Chung | 2011-12-06 |
| 8062422 | Method and apparatus for generating a precursor for a semiconductor processing system | Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli, Jenny Lin +3 more | 2011-11-22 |
| 7965603 | Method of adjusting write strategy of recordable disc | Yi-Hsueh Lee, Shih-Kai Weng, Chao-Wen Hu | 2011-06-21 |
| 7940624 | Method of adjusting write strategy of recordable disc | Chao-Wen Hu, Shih-Kai Weng, Yi-Hsueh Lee | 2011-05-10 |
| 7892602 | Cyclical deposition of refractory metal silicon nitride | Hua Chung, Barry Chin | 2011-02-22 |
| 7867896 | Sequential deposition of tantalum nitride using a tantalum-containing precursor and a nitrogen-containing precursor | Wei Cao, Hua Chung, Vincent Ku | 2011-01-11 |
| 7865634 | Managing a buffer for media processing | — | 2011-01-04 |
| 7780788 | Gas delivery apparatus for atomic layer deposition | Vincent Ku, Dien-Yeh Wu, Hua Chung, Alan Ouye, Norman Nakashima | 2010-08-24 |
| 7780785 | Gas delivery apparatus for atomic layer deposition | Vincent Ku, Dien-Yeh Wu, Hua Chung, Alan Ouye, Norman Nakashima +1 more | 2010-08-24 |
| 7755996 | Method for adjusting write strategy | Chien-Li Hung | 2010-07-13 |
| 7749361 | Multi-component doping of copper seed layer | Jie Chen, Peijun Ding, Suraj Rengarajan, Tram Vo | 2010-07-06 |
| 7699023 | Gas delivery apparatus for atomic layer deposition | Vincent Ku, Dien-Yeh Wu, Hua Chung, Alan Ouye, Norman Nakashima +1 more | 2010-04-20 |
| 7678194 | Method for providing gas to a processing chamber | Seshadri Ganguli, Vincent Ku | 2010-03-16 |
| 7658970 | Noble metal layer formation for copper film deposition | Mei Chang | 2010-02-09 |
| 7597758 | Chemical precursor ampoule for vapor deposition processes | Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli, Jenny Lin +3 more | 2009-10-06 |
| 7591907 | Apparatus for hybrid chemical processing | Vincent Ku, Mei Chang, Dien-Yeh Wu, Hua Chung | 2009-09-22 |
| 7588736 | Apparatus and method for generating a chemical precursor | Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli, Jenny Lin +3 more | 2009-09-15 |
| 7576002 | Multi-step barrier deposition method | Seshadri Ganguli, Wei Cao, Christophe Marcadal | 2009-08-18 |
| 7569191 | Method and apparatus for providing precursor gas to a processing chamber | Seshadri Ganguli, Vincent Ku | 2009-08-04 |
| 7547644 | Methods and apparatus for forming barrier layers in high aspect ratio vias | Fusen Chen, Walter Glenn, Praburam Gopalraja, Jianming Fu | 2009-06-16 |