| 10574882 |
Image capturing apparatus, storage space adjusting method thereof and non-transitory computer-readable recording medium |
— |
2020-02-25 |
|
| 10384707 |
Robot swing structure |
— |
2019-08-20 |
|
| 8668776 |
Gas delivery apparatus and method for atomic layer deposition |
Vincent Ku, Dien-Yeh Wu, Hua Chung, Alan Ouye, Norman Nakashima |
2014-03-11 |
$12,153,000 |
| 8318266 |
Enhanced copper growth with ultrathin barrier layer for high performance interconnects |
Hua Chung, Barry Chin, Hong Mei Zhang |
2012-11-27 |
$5,138,000 |
| 8293328 |
Enhanced copper growth with ultrathin barrier layer for high performance interconnects |
Hua Chung, Barry Chin, Hong Mei Zhang |
2012-10-23 |
$4,153,000 |
| 8070879 |
Apparatus and method for hybrid chemical processing |
Vincent Ku, Mei Chang, Dien-Yeh Wu, Hua Chung |
2011-12-06 |
$11,052,000 |
| 8062422 |
Method and apparatus for generating a precursor for a semiconductor processing system |
Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli, Jenny Lin +3 more |
2011-11-22 |
$8,445,000 |
| 7965603 |
Method of adjusting write strategy of recordable disc |
Yi-Hsueh Lee, Shih-Kai Weng, Chao-Wen Hu |
2011-06-21 |
|
| 7940624 |
Method of adjusting write strategy of recordable disc |
Chao-Wen Hu, Shih-Kai Weng, Yi-Hsueh Lee |
2011-05-10 |
|
| 7892602 |
Cyclical deposition of refractory metal silicon nitride |
Hua Chung, Barry Chin |
2011-02-22 |
$45,924,000 |
| 7867896 |
Sequential deposition of tantalum nitride using a tantalum-containing precursor and a nitrogen-containing precursor |
Wei Cao, Hua Chung, Vincent Ku |
2011-01-11 |
$9,486,000 |
| 7865634 |
Managing a buffer for media processing |
— |
2011-01-04 |
$17,767,000 |
| 7780788 |
Gas delivery apparatus for atomic layer deposition |
Vincent Ku, Dien-Yeh Wu, Hua Chung, Alan Ouye, Norman Nakashima |
2010-08-24 |
$4,612,000 |
| 7780785 |
Gas delivery apparatus for atomic layer deposition |
Vincent Ku, Dien-Yeh Wu, Hua Chung, Alan Ouye, Norman Nakashima +1 more |
2010-08-24 |
$4,612,000 |
| 7755996 |
Method for adjusting write strategy |
Chien-Li Hung |
2010-07-13 |
|
| 7749361 |
Multi-component doping of copper seed layer |
Jie Chen, Peijun Ding, Suraj Rengarajan, Tram Vo |
2010-07-06 |
$6,398,000 |
| 7699023 |
Gas delivery apparatus for atomic layer deposition |
Vincent Ku, Dien-Yeh Wu, Hua Chung, Alan Ouye, Norman Nakashima +1 more |
2010-04-20 |
$11,275,000 |
| 7678194 |
Method for providing gas to a processing chamber |
Seshadri Ganguli, Vincent Ku |
2010-03-16 |
$12,179,000 |
| 7658970 |
Noble metal layer formation for copper film deposition |
Mei Chang |
2010-02-09 |
|
| 7597758 |
Chemical precursor ampoule for vapor deposition processes |
Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli, Jenny Lin +3 more |
2009-10-06 |
$23,969,000 |
| 7591907 |
Apparatus for hybrid chemical processing |
Vincent Ku, Mei Chang, Dien-Yeh Wu, Hua Chung |
2009-09-22 |
$87,813,000 |
| 7588736 |
Apparatus and method for generating a chemical precursor |
Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli, Jenny Lin +3 more |
2009-09-15 |
$12,042,000 |
| 7576002 |
Multi-step barrier deposition method |
Seshadri Ganguli, Wei Cao, Christophe Marcadal |
2009-08-18 |
$17,494,000 |
| 7569191 |
Method and apparatus for providing precursor gas to a processing chamber |
Seshadri Ganguli, Vincent Ku |
2009-08-04 |
$13,023,000 |
| 7547644 |
Methods and apparatus for forming barrier layers in high aspect ratio vias |
Fusen Chen, Walter Glenn, Praburam Gopalraja, Jianming Fu |
2009-06-16 |
$14,977,000 |
