Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8123860 | Apparatus for cyclical depositing of thin films | Randhir P. S. Thakur, Alfred Mak, Ming Xi, Ahmad Khan, Ayad A. Al-Shaikh +2 more | 2012-02-28 |
| 7923069 | Multi-station deposition apparatus and method | Mei Chang, Lawrence Chung-Lai Lei | 2011-04-12 |
| 7794789 | Multi-station deposition apparatus and method | Mei Chang, Lawrence Chung-Lai Lei | 2010-09-14 |
| 7547465 | Multi-station deposition apparatus and method | Mei Chang, Lawrence Chung-Lai Lei | 2009-06-16 |
| 7547644 | Methods and apparatus for forming barrier layers in high aspect ratio vias | Fusen Chen, Ling Chen, Praburam Gopalraja, Jianming Fu | 2009-06-16 |
| 7175713 | Apparatus for cyclical deposition of thin films | Randhir P. S. Thakur, Alfred Mak, Ming Xi, Ahmad Khan, Ayad A. Al-Shaikh +2 more | 2007-02-13 |
| 6974771 | Methods and apparatus for forming barrier layers in high aspect ratio vias | Fusen Chen, Ling Chen, Praburam Gopalraja, Jianming Fu | 2005-12-13 |
| 6932871 | Multi-station deposition apparatus and method | Mei Chang, Lawrence Chung-Lai Lei | 2005-08-23 |
| 6866746 | Clamshell and small volume chamber with fixed substrate support | Lawrence Chung-Lai Lei, Alfred Mak, Gwo-Chuan Tzu, Avi Tepman, Ming Xi | 2005-03-15 |
| 6784096 | Methods and apparatus for forming barrier layers in high aspect ratio vias | Fusen Chen, Ling Chen, Praburam Gopalraja, Jianming Fu | 2004-08-31 |