Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11955362 | Substrate support for reduced damage substrate backside | Joel M. Huston, Cheng-Hsiung Tsai | 2024-04-09 |
| 10857655 | Substrate support plate with improved lift pin sealing | Olkan Cuvalci, Xiaoxiong Yuan | 2020-12-08 |
| 10793951 | Apparatus to improve substrate temperature uniformity | Kazuya Daito, Sang-Hyeob Lee | 2020-10-06 |
| 10280509 | Lid assembly for a processing system to facilitate sequential deposition techniques | Salvador P. Umotoy | 2019-05-07 |
| 9957615 | Apparatus to improve substrate temperature uniformity | Kazuya Daito, Sang-Hyeob Lee | 2018-05-01 |
| 9916994 | Substrate support with multi-piece sealing surface | Olkan Cuvalci, Xiaoxiong Yuan | 2018-03-13 |
| 9783889 | Apparatus for variable substrate temperature control | Xiaoxiong Yuan, Amit Khandelwal, Avgerinos V. Gelatos, Olkan Cuvalci, Kai Wu +1 more | 2017-10-10 |
| 9633889 | Substrate support with integrated vacuum and edge purge conduits | Olkan Cuvalci | 2017-04-25 |
| 9587310 | Lid assembly for a processing system to facilitate sequential deposition techniques | Salvador P. Umotoy | 2017-03-07 |
| 9543186 | Substrate support with controlled sealing gap | Olkan Cuvalci, Joel M. Huston | 2017-01-10 |
| 9490150 | Substrate support for substrate backside contamination control | Olkan Cuvalci, Yu Chang, Xiaoxiong Yuan | 2016-11-08 |
| 9478447 | Substrate support with wire mesh plasma containment | Olkan Cuvalci | 2016-10-25 |
| 8920564 | Methods and apparatus for thermal based substrate processing with variable temperature capability | Xiaoxiong Yuan, Amit Khandelwal, Benjamin C. Wang, Avgerinos V. Gelatos, Kai Wu +3 more | 2014-12-30 |
| 8821637 | Temperature controlled lid assembly for tungsten nitride deposition | Avgerinos V. Gelatos, Sang-Hyeob Lee, Xiaoxiong Yuan, Salvador P. Umotoy, Yu Chang +4 more | 2014-09-02 |
| 8618446 | Substrate support with substrate heater and symmetric RF return | Yu-Chia Chang, Anqing Cui, William Kuang, Olkan Cuvalci | 2013-12-31 |
| 8342119 | Self aligning non contact shadow ring process kit | Joseph Yudovsky, Lawrence Chung-Lai Lei, Salvador P. Umotoy, Tom Madar, Girish Dixit | 2013-01-01 |
| 7905959 | Lid assembly for a processing system to facilitate sequential deposition techniques | Salvador P. Umotoy | 2011-03-15 |
| 6878206 | Lid assembly for a processing system to facilitate sequential deposition techniques | Salvador P. Umotoy | 2005-04-12 |
| 6866746 | Clamshell and small volume chamber with fixed substrate support | Lawrence Chung-Lai Lei, Alfred Mak, Avi Tepman, Ming Xi, Walter Glenn | 2005-03-15 |
| 6589352 | Self aligning non contact shadow ring process kit | Joseph Yudovsky, Lawrence Chung-Lai Lei, Salvador P. Umotoy, Tom Madar, Girish Dixit | 2003-07-08 |
| 6500263 | Semiconductor substrate processing chamber having interchangeable lids actuating plural gas interlock levels | Yu-Feng Chang, Wen Xiao Chen | 2002-12-31 |
| 6220091 | Liquid level pressure sensor and method | Fufa Chen, Yu-Chia Chang | 2001-04-24 |
| 6050446 | Pivoting lid assembly for a chamber | Lawrence Chung-Lai Lei, Son Trinh, Mark S. Johnson | 2000-04-18 |