Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9783889 | Apparatus for variable substrate temperature control | Gwo-Chuan Tzu, Xiaoxiong Yuan, Avgerinos V. Gelatos, Olkan Cuvalci, Kai Wu +1 more | 2017-10-10 |
| 9546419 | Method of reducing tungsten film roughness and resistivity | Avgerinos V. Gelatos | 2017-01-17 |
| 9275865 | Plasma treatment of film for impurity removal | Benjamin C. Wang, Joshua Collins, Michael S. Jackson, Avgerinos V. Gelatos | 2016-03-01 |
| 8920564 | Methods and apparatus for thermal based substrate processing with variable temperature capability | Gwo-Chuan Tzu, Xiaoxiong Yuan, Benjamin C. Wang, Avgerinos V. Gelatos, Kai Wu +3 more | 2014-12-30 |
| 8563424 | Process for forming cobalt and cobalt silicide materials in tungsten contact applications | Seshadri Ganguli, Sang Ho Yu, See-Eng Phan, Mei Chang, Hyoung-Chan Ha | 2013-10-22 |
| 8551880 | Ammonia-based plasma treatment for metal fill in narrow features | Bencherki Mebarki, Linh Thanh | 2013-10-08 |
| 8513116 | Atomic layer deposition of tungsten materials | Madhu Moorthy, Avgerinos V. Gelatos, Kai Wu | 2013-08-20 |
| 8211799 | Atomic layer deposition of tungsten materials | Madhu Moorthy, Avgerinos V. Gelatos, Kai Wu | 2012-07-03 |
| 8187970 | Process for forming cobalt and cobalt silicide materials in tungsten contact applications | Seshadri Ganguli, Sang Ho Yu, See-Eng Phan, Mei Chang, Hyoung-Chan Ha | 2012-05-29 |
| 8071478 | Method of depositing tungsten film with reduced resistivity and improved surface morphology | Kai Wu, Averginos V. Gelatos | 2011-12-06 |
| 7964505 | Atomic layer deposition of tungsten materials | Madhu Moorthy, Avgerinog V. Gelatos, Kai Wu | 2011-06-21 |
| 7838441 | Deposition and densification process for titanium nitride barrier layers | Avgerinos V. Gelatos, Christophe Marcadal, Mei Chang | 2010-11-23 |
| 7745333 | Methods for depositing tungsten layers employing atomic layer deposition techniques | Ken Kaung Lai, Ravi Rajagopalan, Madhu Moorthy, Srinivas Gandikota, Joseph Castro +9 more | 2010-06-29 |
| 7732327 | Vapor deposition of tungsten materials | Sang-Hyeob Lee, Avgerinos V. Gelatos, Kai Wu, Ross Marshall, Emily Renuart +2 more | 2010-06-08 |
| 7691442 | Ruthenium or cobalt as an underlayer for tungsten film deposition | Srinivas Gandikota, Madhu Moorthy, Avgerinos V. Gelatos, Mei Chang, Kavita Shah +1 more | 2010-04-06 |
| 7521379 | Deposition and densification process for titanium nitride barrier layers | Avgerinos V. Gelatos, Christophe Marcadal, Mei Chang | 2009-04-21 |
| 7514353 | Contact metallization scheme using a barrier layer over a silicide layer | Timothy Weidman, Kapila Wijekoon, Zhize Zhu, Avgerinos V. Gelatos, Arulkumar Shanmugasundram +3 more | 2009-04-07 |
| 7429402 | Ruthenium as an underlayer for tungsten film deposition | Srinivas Gandikota, Madhu Moorthy, Avgerinos V. Gelatos, Mei Chang, Kavita Shah +1 more | 2008-09-30 |
| 7405158 | Methods for depositing tungsten layers employing atomic layer deposition techniques | Ken Kaung Lai, Ravi Rajagopalan, Madhu Moorthy, Srinivas Gandikota, Joseph Castro +9 more | 2008-07-29 |